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The ta-C films with sp3 bonds more than 80% in fraction are deposited by FCVA technique, and then they are bombarded by Ar ions. The composition and structures of the ta-C films before and after the bombardment of energetic Ar ions are analyzed by X-ray photoelectron spectroscopy. The surface morphology is investigated by AFM. The result shows that the bombardment of Ar ions induces the conversion of sp3 bond into sp2 bond, and the fraction of sp2 bonds increases with the energy of Ar ion increasing. The stress of the film decreases with the increase of the Ar ion energy. The RMS and etching pits on the surface of film increase with the increase of Ar ion bombarding energy.The friction test indicates that Ar ion bombardment has an important influence on initial friction coefficient, but just has little influence on steady state friction coefficient. The steady state friction coefficient of film keeps about 0.1, which shows a good antiwear property.
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Keywords:
- Ar ion bomdardment /
- X-ray photoelectron spectroscopy /
- stress /
- friction coefficient
[1] Ander A, ander S, Brown I G, Plasma 1995 Source Sci. Technol. 4 1
[2] Zhu J Q, Wang J H, Meng S H, Han J C, Zhang L S 2004 Acta Phys. Sin. 53 1151 (in Chinese) [朱嘉琦, 王景贺, 孟松鹤, 韩杰才, 张连升 2004 物理学报 53 1151]
[3] Liang F, Yan X J 1999 Acta Phys. Sin. 48 1095 (in Chinese) [梁风, 严学俭 1999 物理学报 48 1095]
[4] Stéphane Neuville 2011 Surf. Coat. Technol. 206 703
[5] Kim K S, Seung H L, Yoo C K, Seung C L, Pil R C, Kwang R L 2008 Metal. Mater. Inter. 14 347
[6] Kim T Y, Lee C S, Lee Y J, Lee K R, Chae K H, Oh K H 2007 J. Appl. Phys. 101 023504
[7] Ferrari A C, Klensorge B, Morrison N A, Hart A, Stolojan V, Robertson J 1999 J. Appl. Phys. 85 7191
[8] Zhang P, Tay B K, Yu G Q, Lau S P, Fun Y Q 2004 Diamond Relat. Mater. 13 459
[9] Guo J X, Tay B K, Sun X W, Ding X Z, Chua D H C 2003 Surf. Coat. Technol. 169-170 393
[10] Onoprienko A A, Danilenko N I, Kossko I A, Gorban V F 2008 Surf. Coat. Technol. 202 1728
[11] Zhang X W, Ke N, Cheung W Y, Wong S P 2003 Diamond Relat. Mater. 12 1
[12] Panwar O S, Alim K M, Kumar S, Basu A, Mehta B R, Kumar S, Ishpal I 2010 Surf. Coat. Technol. 205 2126
[13] Ding X Z, Tay B K, Lau S P, Zheng P, Zeng X P 2002 Thin Solid Films 408 183
[14] Shi J R, Sun Z, Shi X 2000 Thin Solid Films 377 269
[15] Han L, Chen X, Yang L, Wang Y W, Wang X Y, Zhao Y Q 2011 Acta Phys. Sin. 60 066804 (in Chinese) [韩亮, 陈仙, 杨立, 王炎武, 王晓艳, 赵玉清 2011 物理学报 60 066804]
[16] Shi X, Tay B K, Tan H S, Zhong L, Tu Y Q, Silva S R P, Miline W I 1996 J. Appl. Phys. 79 7239
[17] Yu G H, Zeng L R, Zhu F W, Chai C L, Lai W Y 2001 J. Appl. Phys. 90 4039
[18] Zhu J Q, Han J C, Han X, H Schiaberg inaki, Wang J Z 2008 J. Appl. Phys. 104 013512
[19] Yu G H, Zeng L R, Zhu F W, Chai C L, Lai W Y 2001 J. Appl. Phys. 90 4039
[20] Me'rel P, Tabbal M, Chaker M, Moisa S, Margot J 1998 Appl. Surf. Sci. 136 105
[21] Hofsäss H, Eldermann H F, Merk R, Sebastian M, Ronning C 1998 J. Appl. Phys. A 66 153
[22] Robertson J 2002 Mater. Sc. Eng. R 34 129
[23] Broitman E, Hellgren N, Wänstrand O, Johansson M P, Berlind T Sjöström H, Sundgren J E, Larsson M, Hultman L 2001 Wear 248 55
[24] Gupta B K, Malshe A, Bhushan B, Subramaniam V V 1994 J. Tribol. 116 445
[25] Donnet C, Grill A 1997 Surf. Coat. Technol. 94-95 456
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[1] Ander A, ander S, Brown I G, Plasma 1995 Source Sci. Technol. 4 1
[2] Zhu J Q, Wang J H, Meng S H, Han J C, Zhang L S 2004 Acta Phys. Sin. 53 1151 (in Chinese) [朱嘉琦, 王景贺, 孟松鹤, 韩杰才, 张连升 2004 物理学报 53 1151]
[3] Liang F, Yan X J 1999 Acta Phys. Sin. 48 1095 (in Chinese) [梁风, 严学俭 1999 物理学报 48 1095]
[4] Stéphane Neuville 2011 Surf. Coat. Technol. 206 703
[5] Kim K S, Seung H L, Yoo C K, Seung C L, Pil R C, Kwang R L 2008 Metal. Mater. Inter. 14 347
[6] Kim T Y, Lee C S, Lee Y J, Lee K R, Chae K H, Oh K H 2007 J. Appl. Phys. 101 023504
[7] Ferrari A C, Klensorge B, Morrison N A, Hart A, Stolojan V, Robertson J 1999 J. Appl. Phys. 85 7191
[8] Zhang P, Tay B K, Yu G Q, Lau S P, Fun Y Q 2004 Diamond Relat. Mater. 13 459
[9] Guo J X, Tay B K, Sun X W, Ding X Z, Chua D H C 2003 Surf. Coat. Technol. 169-170 393
[10] Onoprienko A A, Danilenko N I, Kossko I A, Gorban V F 2008 Surf. Coat. Technol. 202 1728
[11] Zhang X W, Ke N, Cheung W Y, Wong S P 2003 Diamond Relat. Mater. 12 1
[12] Panwar O S, Alim K M, Kumar S, Basu A, Mehta B R, Kumar S, Ishpal I 2010 Surf. Coat. Technol. 205 2126
[13] Ding X Z, Tay B K, Lau S P, Zheng P, Zeng X P 2002 Thin Solid Films 408 183
[14] Shi J R, Sun Z, Shi X 2000 Thin Solid Films 377 269
[15] Han L, Chen X, Yang L, Wang Y W, Wang X Y, Zhao Y Q 2011 Acta Phys. Sin. 60 066804 (in Chinese) [韩亮, 陈仙, 杨立, 王炎武, 王晓艳, 赵玉清 2011 物理学报 60 066804]
[16] Shi X, Tay B K, Tan H S, Zhong L, Tu Y Q, Silva S R P, Miline W I 1996 J. Appl. Phys. 79 7239
[17] Yu G H, Zeng L R, Zhu F W, Chai C L, Lai W Y 2001 J. Appl. Phys. 90 4039
[18] Zhu J Q, Han J C, Han X, H Schiaberg inaki, Wang J Z 2008 J. Appl. Phys. 104 013512
[19] Yu G H, Zeng L R, Zhu F W, Chai C L, Lai W Y 2001 J. Appl. Phys. 90 4039
[20] Me'rel P, Tabbal M, Chaker M, Moisa S, Margot J 1998 Appl. Surf. Sci. 136 105
[21] Hofsäss H, Eldermann H F, Merk R, Sebastian M, Ronning C 1998 J. Appl. Phys. A 66 153
[22] Robertson J 2002 Mater. Sc. Eng. R 34 129
[23] Broitman E, Hellgren N, Wänstrand O, Johansson M P, Berlind T Sjöström H, Sundgren J E, Larsson M, Hultman L 2001 Wear 248 55
[24] Gupta B K, Malshe A, Bhushan B, Subramaniam V V 1994 J. Tribol. 116 445
[25] Donnet C, Grill A 1997 Surf. Coat. Technol. 94-95 456
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