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Influence of radio-frequency power on the state of H2/C4H8 glowing discharge plasma

Li Rui He Zhi-Bing He Xiao-Shan Niu Zhong-Cai Yang Xiang-Dong

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Influence of radio-frequency power on the state of H2/C4H8 glowing discharge plasma

Li Rui, He Zhi-Bing, He Xiao-Shan, Niu Zhong-Cai, Yang Xiang-Dong
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  • Taking advantage of the glowing discharge technology and plasma mass spectrometry diagnosis technology, the variation rules of positive ion species and energy with power in H2/C4H8 mixture gas are investigated. The characteristic ions are measured and their forming process is discussed. The results show that the intensity of the C-H segment ions in the H2/C4H8 plasma increases with radio-frequency (RF) power increasing, the intensity reaches a maximum at an RF power of 20 W, and then reduces after the RF power has reached 25 W. The relative concentration of m/e 57 (C4H9+) is highest when the power is less than 10 W, and when the power is more than 10 W, the relative concentration of m/e 39 (C3H3+) reaches a maximum. The energy of the C-H segment ions increases gradually with the increase of RF power. The qualitative analyses of H2/C4H8 plasma composition and energy will be beneficial to improving the fabrication technology of glowing discharge polymer coating.
    • Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 10974139, 10964002).
    [1]

    Zhang B L, He Z B, Wu W D, Liu X H, Yang X D 2009 Acta Phys. Sin. 58 4636 (in Chinese) [张宝玲, 何智兵, 吴卫东, 刘兴华, 杨向东 2009 物理学报 58 6436]

    [2]

    Mcquillan B W, Nikroo A, Steinman D A, Elsner F H, Czechowicz D G, Hoppe M L, Sixtus M, Miller W J 1996 Fusion Technol. (USA) 31 381

    [3]

    Ristein J, Stief R T, Ley L, Beyer J 1998 J. Appl. Phys. 84 3836

    [4]

    Auciello O, Flamn D L (Translated by Zheng S B, Hu J F, Guo S J, Hong M Y) 1994 Plasma Diagnostics (vol. 1): Discharge Parameters and Chemistry (Beijing: Electronic Industry Press) p38 (in Chinese) [奥切洛O, 弗拉姆 D L著 (郑少白, 胡建芳, 郭淑静, 洪明苑译) 1994 等离子体诊断 (第一卷): 放电参量和化学 (北京: 电子工业出版社) 第38页]

    [5]

    Benninghoven A 1994 Angew. Chem. Int. Ed. Engl. 33 1023

    [6]

    Zhao Y X, Sun X Y 2010 The Spectrum Analysis on Structure of Organic Molecules (Beijing: Science Press) p1 (in Chinese) [赵瑶兴, 孙祥玉 2010 有机分子结构光谱解析 (北京: 科学出版社) 第1页]

    [7]

    Zhang Q 2003 Modern Technique and Characterization Methods (Self-Complied Teaching Materials by Sichuan University) p154 (in Chinese) [张倩 2003 近代测试技术及表征 (四川大学自编讲义) 第154页]

    [8]

    Zhao Y X, Sun X Y 2010 The Spectral Identification on Structure of Organic Molecules (2nd Edn.) (Beijing: Science Press) p16(in Chinese) [赵瑶兴, 孙祥玉 2010 有机分子结构光谱鉴定 (第二版) (北京: 科学出版社) 第16页]

    [9]

    VanLeyen D, Hagenhoff B, Niehuis E, Benninghoven A, Bletss I V, Hercules D M 1989 J. Vac. Sci. Technol. A7 1790

    [10]

    Hittle L R, Hercules D M 1994 Surf. Interface Anal. 21 217

    [11]

    Ding J N, Qi H S, Yuan N Y, He Y L Cheng G G, Fan Z, Pan H B, Wang J X, Wang X Q 2009 Chin. J. Vac. Sci. Technol. 29 188 (in Chinese) [丁建宁, 祁宏山, 袁宁一, 何宇亮, 程广贵, 范真, 潘海彬, 王君雄, 王秀琴 2009 真空科学与技术学报 29 188]

    [12]

    Bauer M, Schwarz-Selinger T, Jacob W 2005 J. Appl. Phys. 98 73302

  • [1]

    Zhang B L, He Z B, Wu W D, Liu X H, Yang X D 2009 Acta Phys. Sin. 58 4636 (in Chinese) [张宝玲, 何智兵, 吴卫东, 刘兴华, 杨向东 2009 物理学报 58 6436]

    [2]

    Mcquillan B W, Nikroo A, Steinman D A, Elsner F H, Czechowicz D G, Hoppe M L, Sixtus M, Miller W J 1996 Fusion Technol. (USA) 31 381

    [3]

    Ristein J, Stief R T, Ley L, Beyer J 1998 J. Appl. Phys. 84 3836

    [4]

    Auciello O, Flamn D L (Translated by Zheng S B, Hu J F, Guo S J, Hong M Y) 1994 Plasma Diagnostics (vol. 1): Discharge Parameters and Chemistry (Beijing: Electronic Industry Press) p38 (in Chinese) [奥切洛O, 弗拉姆 D L著 (郑少白, 胡建芳, 郭淑静, 洪明苑译) 1994 等离子体诊断 (第一卷): 放电参量和化学 (北京: 电子工业出版社) 第38页]

    [5]

    Benninghoven A 1994 Angew. Chem. Int. Ed. Engl. 33 1023

    [6]

    Zhao Y X, Sun X Y 2010 The Spectrum Analysis on Structure of Organic Molecules (Beijing: Science Press) p1 (in Chinese) [赵瑶兴, 孙祥玉 2010 有机分子结构光谱解析 (北京: 科学出版社) 第1页]

    [7]

    Zhang Q 2003 Modern Technique and Characterization Methods (Self-Complied Teaching Materials by Sichuan University) p154 (in Chinese) [张倩 2003 近代测试技术及表征 (四川大学自编讲义) 第154页]

    [8]

    Zhao Y X, Sun X Y 2010 The Spectral Identification on Structure of Organic Molecules (2nd Edn.) (Beijing: Science Press) p16(in Chinese) [赵瑶兴, 孙祥玉 2010 有机分子结构光谱鉴定 (第二版) (北京: 科学出版社) 第16页]

    [9]

    VanLeyen D, Hagenhoff B, Niehuis E, Benninghoven A, Bletss I V, Hercules D M 1989 J. Vac. Sci. Technol. A7 1790

    [10]

    Hittle L R, Hercules D M 1994 Surf. Interface Anal. 21 217

    [11]

    Ding J N, Qi H S, Yuan N Y, He Y L Cheng G G, Fan Z, Pan H B, Wang J X, Wang X Q 2009 Chin. J. Vac. Sci. Technol. 29 188 (in Chinese) [丁建宁, 祁宏山, 袁宁一, 何宇亮, 程广贵, 范真, 潘海彬, 王君雄, 王秀琴 2009 真空科学与技术学报 29 188]

    [12]

    Bauer M, Schwarz-Selinger T, Jacob W 2005 J. Appl. Phys. 98 73302

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Publishing process
  • Received Date:  17 April 2012
  • Accepted Date:  23 May 2012
  • Published Online:  05 November 2012

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