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Influence of addifion of electronegative gases on the properties of capacitively coupled Ar plasmas

Hong Bu-Shuang Yuan Tao Zou Shuai Tang Zhong-Hua Xu Dong-Sheng Yu Yi-Qing Wang Xu-Sheng Xin Yu

Citation:

Influence of addifion of electronegative gases on the properties of capacitively coupled Ar plasmas

Hong Bu-Shuang, Yuan Tao, Zou Shuai, Tang Zhong-Hua, Xu Dong-Sheng, Yu Yi-Qing, Wang Xu-Sheng, Xin Yu
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  • Abstract views:  5988
  • PDF Downloads:  547
  • Cited By: 0
Publishing process
  • Received Date:  10 September 2012
  • Accepted Date:  05 December 2012
  • Published Online:  05 June 2013

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