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The fabrication of the antireflective periodic nano-arrary structure on Si surface using nanoimprint lithography and the study on its properties

Zhang Zheng Xu Zhi-Mou Sun Tang-You He Jian Xu Hai-Feng Zhang Xue-Ming Liu Shi-Yuan

Citation:

The fabrication of the antireflective periodic nano-arrary structure on Si surface using nanoimprint lithography and the study on its properties

Zhang Zheng, Xu Zhi-Mou, Sun Tang-You, He Jian, Xu Hai-Feng, Zhang Xue-Ming, Liu Shi-Yuan
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  • Abstract views:  5037
  • PDF Downloads:  1097
  • Cited By: 0
Publishing process
  • Received Date:  27 March 2013
  • Accepted Date:  02 May 2013
  • Published Online:  05 August 2013

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