Effects of controlled surface states on the photoluminescence emission of GaN film

Zhou Nan; Zheng Qiang; Hu Bei-Chen; Shi De-Quan; Miao Chun-Yu; Ma Chun-Yu; Liang Hong-Wei; Hao Sheng-Zhi; Zhang Qing-Yu

doi:10.7498/aps.63.137802

Abstract

Hot phosphor acid (H3 PO4) etching and/or SiOxNy surface passivation are used to change the surface states of high-resistance intrinsic GaN films. The films are investigated to reveal the influence of controlled surface states on photoluminescence (PL) emission. It is found that H3 PO4 etching cannot improve the ultraviolet (UV) PL emission obviously, but the PL spectrum in the range of visible light is considerably enhanced. After passivation with SiOxNy film, the quantum efficiency of UV PL is increased by a factor of 12-13. Meanwhile, the visible PL is significantly enhanced. By analyzing the PL spectra of the etched and passivated samples obtained at room temperature and low temperatures, we discuss the role of surface states in PL emission in the range of UV, blue and yellow bands, and the related physical mechanisms.

Keywords:

Authors and contacts

1.
Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, School of Physics and Opto-electronic Technology, Dalian University of Technology, Dalian 116024, China

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Cited By

[1]	Nakamura S, Pearton S, Fasol G 2000 The Blue Laser Diode (New York: Springer) pp193-273
[2]	Nagahama S, Yanamoto T, Sano M, Mukai T 2002 Phys. Status. Solidi A 190 235
[3]	Guha S, Bojarczuk N A 1998 Appl. Phys. Lett. 72 415
[4]	Luo Y, Guo W P, Shao J P, Hu H, Han Y J, Xue S, Wang L, Sun C Z, Hao Z B 2004 Acta Phys. Sin. 53 2720 (in Chinese)[罗毅, 郭文平, 邵嘉平, 胡卉, 韩彦军, 薛松, 汪莱, 孙长征, 郝智彪 2004 物理学报 53 2720]
[5]	Liu N X, Wang H B, Liu J P, Niu N H, Han J, Shen G D 2006 Acta Phys. Sin. 55 1424 (in Chinese)[刘乃鑫, 王怀兵, 刘建平, 牛南辉, 韩军, 沈光地 2006 物理学报 55 1424]
[6]	Adelmann C, Brault J, Mula G, Daudin B, Lymperakis L, Neugebauer J 2003 Phys. Rev. B 67 165419
[7]	Lee J M, Chang K M, Kim S W, Huh C, Lee I H, Park S J 2000 J. Appl. Phys. 87 7667
[8]	Guha S, Keller R C, Yang V, Shahedipour F, Wessels B W 2001 Appl. Phys. Lett. 78 58
[9]	Chevtchenko S, Reshchikov M A, Zhu K, Moon Y T, Baski A A, Morkoç H 2006 Mater. Res. Soc. Symp. Proc. 892 575
[10]	Chevtchenko S A, Reshchikov M A, Fan Q, Ni X, Moon Y T, Baski A A, Morkoç H 2007 J. Appl. Phys. 101 113709
[11]	Adivarahan V, Simin G, Yang J W, Lunev A, Asif Khan M, Pala N, Shur M, Gaska R 2000 Appl. Phys. Lett. 77 863
[12]	Bae C, Krug C, Lucovsky G, Chakraborty A, Mishra U 2004 J. Appl. Phys. 96 2674
[13]	Green B M, Chu K K, Chumbes E M, Smart J A, Shealy J R, Eastman L F 2000 IEEE Electron Dev. Lett. 21 268
[14]	Skromme B J, Sandroff C J, Yablonovitch E, Gmitter T 1987 Appl. Phys. Lett. 51 2022
[15]	Aspnes D E 1983 Surf. Sci. 132 406
[16]	Song J O, Park S J, Seong T Y 2002 Appl. Phys. Lett. 80 3129
[17]	Lai T S, Lin W Z, Mo D 2002 Acta Phys. Sin. 51 1149 (in Chinese)[赖天树, 林位株, 莫党 2002 物理学报 51 1149]
[18]	Lai T S, Fan H H, Liu Z D, Lin W Z 2003 Acta Phys. Sin. 52 2638 (in Chinese)[赖天树, 范海华, 柳振东, 林位株 2003 物理学报 52 2638]
[19]	Neugebauer J, Van de Walle C G 1996 Appl. Phys. Lett. 69 503
[20]	Polenta L, Castaldini A, Cavallini A 2007 J. Appl. Phys. 102 063702
[21]	Li S T, Wang L, Xin Y, Peng X X, Xiong C B, Yao D M, Jiang F Y 2000 Chin. J. Lumin. 21 29 (in Chinese)[李述体, 王立, 辛勇, 彭学新, 熊传兵, 姚冬敏, 江风益 2000 发光学报 21 29]
[22]	Reshchikov M A, Morkoç H 2005 J. Appl. Phys. 97 061301
[23]	Reshchikov M A, Shahedipour F, Korotkov R Y, Wessels B W, Ulmer M P 2000 J. Appl. Phys. 87 3351
[24]	Xu B, Yu Q X, Wu Q H, Liao Y, Wang G Z, Fang R C 2004 Acta Phys. Sin. 53 204 (in Chinese)[徐波, 余庆选, 吴气虹, 廖源, 王冠中, 方容川 2004 物理学报 53 204]
[25]	Yao T, Hong S K 2009 Oxide and Nitride Semiconductors (New York: Springer) pp316-320
[26]	Shen X C 2002 Semiconductor Spectroscopy and Optical Properties (Beijing: Science Press) p288 (in Chinese) [沈学础 2002 半导体光谱和光学性质(北京:科学出版社) 第288页]

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Vol. 63, Issue 13 - 2014-07-05

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