Spectra study of He-irradiation induced defects in 6H-SiC

Du Yang-Yang; Li Bing-Sheng; Wang Zhi-Guang; Sun Jian-Rong; Yao Cun-Feng; Chang Hai-Long; Pang Li-Long; Zhu Ya-Bin; Cui Ming-Huan; Zhang Hong-Peng; Li Yuan-Fei; Wang Ji; Zhu Hui-Ping; Song Peng; Wang Dong

doi:10.7498/aps.63.216101

Abstract

Specimens of 6H-SiC were irradiated by 300keV He ions at temperatures of RT, 450, 600 and 750 ℃ with fluences ranging from 11015 to 11017 cm-2. Post-irradiation, virgin and irradiated 6H-SiC specimens are measured and studied by microscopic laser confocal Raman spectrometer and UV-visible transmission apparatus. Analyses of both experimental results shown that production and recovery of defects caused by irradiation are directly related to the fluences and temperatures. Amorphization of 6H-SiC irradiated at RT occurrs, which is reflected by the disappearance of the Raman peaks and the saturation of the relative Raman intensity(simultaneously a strong Si-Si peak appears). Recovery of defects may exist in high-temperature irradiation, when helium bubbles do not exist, so that irradiation-induced defects can be easily recovered during irradiation process at elevated temperatures; but when helium bubbles are present, they can inhibit defects to recover, as shown in the trend of slopes of curves representing the relative Raman intensity and the relative absorption coefficients. This paper mainly focuses on the effects of helium bubbles on defect accumulation and recovery under the condition of high temperature irradiation, and then the comparison with the results of 6H-SiC irradiated by Si ions at elevated temperatures.

Keywords:

Authors and contacts

1.
Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China;
2.
University of Chinese Academy of Sciences, Beijing 100049, China
Funds: Project supported by the National Basic Research Program of China (973 Program) (Grant No. 2010cB832902), and the National Natural Science Foundation of China (Grant Nos. 11005130, 11105190, 11475229, 91126011).

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Cited By

[1]	Zhang H H, Zhang C H, Li B S, Zhou L H, Yang Y T, Fu Y C 2009 Acta Phys. Sin. 58 3302 (in Chinese) [张洪华, 张崇宏, 李炳生, 周丽宏, 杨义涛, 付云翀 2009 物理学报 58 3302]
[2]	Xu C L, Zhang C H, Li B S, Zhang L Q, Yang Y T, Han L H, Jia X J 2011 Nuclear Physica Review 28 209 (in Chinese) [徐超亮, 张崇宏, 李炳生, 张丽卿, 杨义涛, 韩录会, 贾秀军 2011 原子核物理评论 28 209]
[3]
[4]	Xu P S, Xie C K, Pan H B, Xu F Q 2004 Chin. Phys. 13 2126
[5]
[6]	Qin X F, Wang F X, Liang Y, Fu G, Zhao Y M 2010 Acta Phys. Sin. 59 6390 (in Chinese) [秦希峰, 王凤翔, 梁毅, 付刚, 赵优美 2010 物理学报 59 6390]
[7]
[8]
[9]	Zhang C H, Sun Y M, Song Y 2007 Nucl Instr and Meth B 256 243
[10]
[11]	Zhang Y, Zhang C H, Zhou L H 2010 Acta Phys. Sin. 59 4130 (in Chinese) [张勇, 张崇宏, 周丽宏 2010 物理学报 59 4130]
[12]
[13]	Edmond J A, Withrow S P, Kong H S, Davis R F 1986 Mater. Res. Soc. Proc. 51 395
[14]
[15]	Heera V, Stoemenos J, Kogler R, Skorupa W 1995 J. Appl. Phys. 77 2999
[16]	Beaufort M F, Pailloux F, DeclemyA, Barbot J F 2003 J. Appl. Phys. 94 7116
[17]
[18]	Zhang C H, Song Y, Yang Y T, Zhou C L, Wei L, Ma H J 2014 Nucl. Instrum. Methods Phys. Res. B 326 345
[19]
[20]
[21]	Dong L, Sun G S, Yu J, Zheng L, Liu X F, Zhang F, Yan G G, Li X G, Wang Zh G, Yang F 2013 Chin. Phys. Lett. 30 096105
[22]
[23]	Grisola J, de Mauduit B, Gimbert J, Billon Th, Ben Assayag G, Bourgerette C, Claverie A 1999 Nucl. Instrum. Methods Phys. Res. B 147 62
[24]	Heera V, Stoemenos J, Kogler R, Voelskow M, Skorupa W 1999 J. Appl. Phys. 85 1378
[25]
[26]	Persson P O A, Hultman L, Janson M S, Hallen A, Yakimova R, Pankin DSkorupa W 2002 J. Appl. Phys. 92 2501
[27]
[28]	Zhu W, Ruan Y F, Chen J, Ma P F, Wang P F, Huang L 2012 Bulletin Of The Chinese Ceramic Society 31 386 (in Chinese) [祝威, 阮永丰, 陈敬, 马鹏飞, 王鹏飞, 黄丽 2012 硅酸盐通报 31 386]
[29]
[30]	Wang C, Zhang Y M, Zhang Y M 2007 Chin. Phys. 16 1417
[31]
[32]
[33]	Cheng P, Zhang Y M, Zhang Y M, Guo H 2010 Chin. Phys. B 19 097802
[34]	Snead L L, Zinkle S J 1995 Mater. Res. Soc. Proc. 373 377
[35]
[36]
[37]	Zinkle S J, Snead L L 1996 Nucl. Instrum. Methods Phys. Res. B 116 92
[38]	Weber W J, Wang L M, Yu N, Hess N J 1998 Mater. Sci. Eng. A 253 62
[39]
[40]
[41]	Wendler E, Heft A, Wesch W 1998 Nucl. Instrum. Methods Phys. Res. B 141 105
[42]	Heera V, Kogler R, Skorupa W 1995 Appl. Phys. Lett. 67 1999
[43]
[44]	Heft A, Wendler E, Heindl J, Bachmann T, Glaser E, Strunk H P, Wesch W 1996 Nucl. Instrum. MethodsPhys. Res. B 113 239
[45]
[46]	Pacaud Y, Stoemenos J, Brauer G, Yankov R A, Heera V, Voelskow M, Kogler R, Skorupa W 1996 Nucl. Instrum. Methods Phys. Res. B 120 177
[47]
[48]	Hofgen A, Heera V, Eicchorn F, Skorupa W 1998 J. Appl. Phys. 84 4769
[49]
[50]	Bus T, van Veen A, Shiryaev A, Fedorov A V, Schut H, Tichelaar F D, Sietsma J 2003 Mater. Sci. Eng. B 102 269
[51]
[52]	Debelle A, Backman M, Thom L, Nordlund K, Djurabekova F, Weber W J, Monnet I, Pakarinen O H, Garrido F, Paumier F 2014 Nucl. Instrum. Methods. Phys. Res. B 326 326
[53]
[54]
[55]	Helf A, Wendler E, Bachmann T, Glaser E, Wesch W 1995 Mater. Eng. B 29 142
[56]	Helf A, Wendler E, Heindl J, Bachmann T, Glaser E, Strunk H P. Wesch W 1996 Nucl. Instrum. Meth. Phys. Res. B 113 239
[57]
[58]	Zhang H H, Zhang C H, Li B S, Han L H, Zhang Y 2010 Nucl. Instrum. Methods. Phys. Res. B 268 2318
[59]
[60]	Sorieul S, Costantini J M, Gosmain L, Thome L, Grob J J 2006 J. Phys. Cons. Matter 18 5235
[61]
[62]	Wang X, Zhang Y W, Liu S Y, Zhao Z Q 2014 Nucl. Instrum. Methods. Phys. Res. B 319 55
[63]
[64]
[65]	Gao X, Sun G S, Li J M, Zhang Y X, Wang L, Zhao W S, Zeng Y P 2005 Chin. Phys. 14 0599
[66]	Sorieul S, Kerbiriou X, Costantini J M, Gosmain L, Calas G, Trautmann C 2012 J. Phys. Cons. Matter 24 125801
[67]
[68]
[69]	Sorieul S, Costantini J M, Gosmain L, Thome L 2006 J. Phys. Cons. Matter 18 8493
[70]	Li B S, Zhang C H, Zhang H H, Shibayama T, Yang Y T 2011 Vacuum 86 452
[71]
[72]	Li M J 2003 Ph. D. Diessertation (Shandong University) (in Chinese) [李美江 2003 博士学位论文 (山东: 山东大学)]
[73]
[74]	Zhang C H, Donnelly S E, Vishnyakov V M, Evans J H, Shibayama T, Sun Y M 2004 Nucl. Instrum. Methods. Phys. Res. B 218 53
[75]
[76]	Weber WJ, Yu N 1997 Nucl. Instrum. Methods. Phys. Res. B 191 127
[77]
[78]
[79]	Heliou R, Brebner J L, Roorda S 2001 Nucl. Instrum. Methods. Phys. Res. B 175-177 268

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Vol. 63, Issue 21 - 2014-11-05

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