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Pattern transfer and molecular chain orientation modulation by soft template during the nanoimprint lithography

Lu Nai-Yan Weng Yu-Yan

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Pattern transfer and molecular chain orientation modulation by soft template during the nanoimprint lithography

Lu Nai-Yan, Weng Yu-Yan
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  • The templates for the nanoimprinting are fabricated usually through a series of steps, such as E-beam lithography, E-beam deposition, liftoff and reactive ion etching. Any mistake during these steps would lead to the failure of the fabrication, so the template is always expensive and difficult to make. Under this circumstance, it is really important to find an effective way to build the template. In this report, the patterned photoresist layer is used as a mother set of the pattern definition of the soft template polydimethylsiloxane. The grating structure of conjugated polymer poly (9,9-dioctylfluorene) film is successfully obtained by this template in the nanoimprinting process. In addition, we also find the anisotropy of molecular chain distribution. Both the transmission electron microscope diffraction pattern and the polarized absorption spectrum are used to prove that this anisotropy is induced by the molecular chain alignment, which would be really helpful in future applications in organic emission equipment. Moreover, this result is also applicable to the poly (9,9-dioctylfluorenyl-2,7-diyl)-alt-co-(1,4-benzo-2,1',3-thiadiazole) film system.
    • Funds: Project supported by the National Natural Science Foundation of China (Grant No. 21204058), and the Fundamental Research Funds for the Central Universities (Grant No. JUSRP11433).
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    Peng J, Xu Z M, Wu X F, Sun T Y 2013 Acta Phys. Sin. 62 036104 (in Chinese) [彭静, 徐智谋, 吴小峰, 孙堂友 2013 物理学报 62 036104]

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    Yaman M, Khudiyev T, Ozgur E, Kanik M, Aktas O, Ozgur E O, Deniz H, Korkut E, Bayindir M 2011 Nat. Mater. 10 494

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    Xu Q B, Rioux R M, Dickey M D, Whitesides G M 2008 Accounts Chem. Res. 41 1566

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    Park H J, Kang M G, Guo L J 2009 ACS Nano 3 2601

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    Voet V S D, Pick T E, Park S M, Moritz M, Hammack A T, Urban J J, Ogletree D F, Olynick D L, Helms B A 2011 J. Am. Chem. Soc. 133 2812

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    Zhang Z, Xu Z M, Sun T Y, He J, Xu H F, Zhang X M, Liu S Y 2013 Acta Phys. Sin. 62 168102 (in Chinese) [张铮, 徐智谋, 孙堂友, 何健, 徐海峰, 张雪明, 刘世元 2013 物理学报 62 168102]

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    Zhou W M, Niu X M, Min G Q, Song Z T, Zhang J, Liu Y B, Li X L, Zhang J P, Feng S L 2009 Microelectron. Eng. 86 2375

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    Zhang Z, Xu Z M, Sun T Y, Xu H F, Chen C H, Peng J 2014 Acta Phys. Sin. 63 018102 (in Chinese) [张铮, 徐智谋, 孙堂友, 徐海峰, 陈存华, 彭静 2014 物理学报 63 018102]

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    Roach P, Shirtcliffe N J, Newton M I 2008 Soft Matter 4 224

    [16]

    Xia Y, Whitesides G M 1998 Angew. Chem. Int. Edit. 37 550

    [17]

    Chaudhury M K, Whitesides G M 1991 Langmiur 7 1013

    [18]

    Wang D F, Zhang X D, Liu Y J, Wu C Y, Zhang C S, Wei C C, Zhao Y 2013 Chin. Phys. B 22 027801

    [19]

    Zhuang Z, Liu B, Zhang R, Li Y C, Xie Z L, Chen P, Zhao H, Xiu X Q, Zheng Y D 2013 Laser & Optoelectronics Progress 50 020002 (in Chinese) [庄喆, 刘斌, 张荣, 李烨超, 谢自力, 陈鹏, 赵红, 修向前, 郑有炓 2013 激光与光电子学进展 50 020002]

    [20]

    Chen S H, Su A C, Su C H, Chen S A 2005 Macromolecules 38 379

    [21]

    Hu Z J, Jonas A M 2010 Soft Matter 6 21

    [22]

    Ding G Z, Wu Y J, Weng Y Y, Zhang W D, Hu Z J 2013 Macromolecules 46 8638

    [23]

    Du D H, Wen H Y, Hu Z J, Weng Y Y, Zhang W D 2014 Nanotechnology 25 195503

    [24]

    Wen H Y, Zhang W D, Weng Y Y, Hu Z J 2014 RSC Adv. 4 11776

  • [1]

    Veinot J G C, Marks T J 2005 Accounts Chem. Res. 38 632

    [2]

    Peng J, Xu Z M, Wu X F, Sun T Y 2013 Acta Phys. Sin. 62 036104 (in Chinese) [彭静, 徐智谋, 吴小峰, 孙堂友 2013 物理学报 62 036104]

    [3]

    Nguyen T D, Hukic-Markosian G, Wang F J, Wojcik L, Li X G, Ehrenfreund E, Vardeny Z V 2010 Nat. Mater. 9 345

    [4]

    Forrest S R 2004 Nature 428 911

    [5]

    Hu Z J, Tian M W, Nysten B, Jonas A M 2009 Nat. Mater. 8 62

    [6]

    Podsiadlo P, Kaushik A K, Arruda E M, Waas A M, Shim B S, Xu J D, Nandivada H, Pumplin B G, Lahann J, Ramamoorthy A, Kotov N A 2007 Science 318 80

    [7]

    Yaman M, Khudiyev T, Ozgur E, Kanik M, Aktas O, Ozgur E O, Deniz H, Korkut E, Bayindir M 2011 Nat. Mater. 10 494

    [8]

    Chou S Y, Krauss P R, Renstrom P J 1996 J. Vac. Sci. Technol. B 14 4129

    [9]

    Xu Q B, Rioux R M, Dickey M D, Whitesides G M 2008 Accounts Chem. Res. 41 1566

    [10]

    Park H J, Kang M G, Guo L J 2009 ACS Nano 3 2601

    [11]

    Voet V S D, Pick T E, Park S M, Moritz M, Hammack A T, Urban J J, Ogletree D F, Olynick D L, Helms B A 2011 J. Am. Chem. Soc. 133 2812

    [12]

    Zhang Z, Xu Z M, Sun T Y, He J, Xu H F, Zhang X M, Liu S Y 2013 Acta Phys. Sin. 62 168102 (in Chinese) [张铮, 徐智谋, 孙堂友, 何健, 徐海峰, 张雪明, 刘世元 2013 物理学报 62 168102]

    [13]

    Zhou W M, Niu X M, Min G Q, Song Z T, Zhang J, Liu Y B, Li X L, Zhang J P, Feng S L 2009 Microelectron. Eng. 86 2375

    [14]

    Zhang Z, Xu Z M, Sun T Y, Xu H F, Chen C H, Peng J 2014 Acta Phys. Sin. 63 018102 (in Chinese) [张铮, 徐智谋, 孙堂友, 徐海峰, 陈存华, 彭静 2014 物理学报 63 018102]

    [15]

    Roach P, Shirtcliffe N J, Newton M I 2008 Soft Matter 4 224

    [16]

    Xia Y, Whitesides G M 1998 Angew. Chem. Int. Edit. 37 550

    [17]

    Chaudhury M K, Whitesides G M 1991 Langmiur 7 1013

    [18]

    Wang D F, Zhang X D, Liu Y J, Wu C Y, Zhang C S, Wei C C, Zhao Y 2013 Chin. Phys. B 22 027801

    [19]

    Zhuang Z, Liu B, Zhang R, Li Y C, Xie Z L, Chen P, Zhao H, Xiu X Q, Zheng Y D 2013 Laser & Optoelectronics Progress 50 020002 (in Chinese) [庄喆, 刘斌, 张荣, 李烨超, 谢自力, 陈鹏, 赵红, 修向前, 郑有炓 2013 激光与光电子学进展 50 020002]

    [20]

    Chen S H, Su A C, Su C H, Chen S A 2005 Macromolecules 38 379

    [21]

    Hu Z J, Jonas A M 2010 Soft Matter 6 21

    [22]

    Ding G Z, Wu Y J, Weng Y Y, Zhang W D, Hu Z J 2013 Macromolecules 46 8638

    [23]

    Du D H, Wen H Y, Hu Z J, Weng Y Y, Zhang W D 2014 Nanotechnology 25 195503

    [24]

    Wen H Y, Zhang W D, Weng Y Y, Hu Z J 2014 RSC Adv. 4 11776

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Publishing process
  • Received Date:  12 August 2014
  • Accepted Date:  31 August 2014
  • Published Online:  05 November 2014

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