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Experimental research on laser-produced Gd target plasma source for 6.7 nm lithography

Dou Yin-Ping Xie Zhuo Song Xiao-Lin Tian Yong Lin Jing-Quan

Citation:

Experimental research on laser-produced Gd target plasma source for 6.7 nm lithography

Dou Yin-Ping, Xie Zhuo, Song Xiao-Lin, Tian Yong, Lin Jing-Quan
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  • Abstract views:  5103
  • PDF Downloads:  196
  • Cited By: 0
Publishing process
  • Received Date:  03 April 2015
  • Accepted Date:  13 July 2015
  • Published Online:  05 December 2015

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