Development of basic theory and application of cryogenic X-ray spectrometer in light sources and X-ray satellite

Zhang Shuo; Cui Wei; Jin Hai; Chen Liu-Biao; Wang Jun-Jie; Wu Wen-Tao; Wu Bing-Jun; Xia Jing-Kai; Song Yan-Ru; Yang Jin-Ping; Weng Tsu-Chien; Liu Zhi

doi:10.7498/aps.70.20210350

Abstract

Cryogenic X-ray spectrometers are advantageous in the spectrum research for weak and diffusive X-ray source due to their high energy resolution, high detection efficiency, low noise level and non-dead-layer properties. Their energy resolution independent of the incident X-ray direction also makes them competitive in diffusion source detection. The requirements for X-ray spectrometers have heightened in recent years with the rapid development of large scientific facilities where X-ray detection is demanded, including beamline endstations in synchrotron and X-ray free electron laser facilities, accelerators, highly charged ion traps, X-ray space satellites, etc. Because of their excellent performances, cryogenic X-ray detectors are introduced into these facilities, typical examples of which are APS, NSLS, LCLS-II, Spring-8, SSNL, ATHENA, HUBS. In this paper, we review the cryogenic X-ray spectrometers, from the working principle and classification, system structure, major performance characteristics to the research status and trend in large scientific facilities in the world.

Keywords:

Authors and contacts

1.
Center for Transformative Science, Shanghai Tech University, Shanghai 201210, China
2.
Department of Astronomy, Tsinghua University, Beijing 201203, China
3.
Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China
4.
Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

Corresponding author: Liu Zhi, liuzhi@shanghaitech.edu.cn

Funds: Project supported by the Special Fund for Research on National Major Research Instrument and Facilities of the National Natural Science Fundation of China (Grant No. 11927805), the Young Scientists Fund of the National Natural Science Foundation of China (Grant Nos. 12005134, 11803014), and the Shanghai Pujiang Program, China (Grant No. 20PJ1410900)

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Figure 5. Structure diagram of the dilution refrigerator (DR) used in the cryogenic X-ray spectrometer for SEM application. In order to reduce the vibration interference to the SEM system, the refrigerator has made many vibration-isolation structures with an overall height of about 2 m. Referenced from Ref. [52].

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图 6 STJ的结构图, 最外层的Ta用于X射线的吸收, 中间的Al-AlO_x-Al作为约瑟夫森结产生电压信号, 本图参考自文献[54]

Figure 6. Structure diagram of the STJ detector, the outermost Ta layer is used for X-ray absorption, and the middle Al-AlO_x -Al structure is used as a Josephson Junction to generate voltage signals. Referenced from Ref. [54].

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图 7 三种微量能器的结构图, 他们的区别主要体现在温度计结构以及吸收体材质和厚度上

Figure 7. Structure diagrams of three different kinds of microcalorimeter. They are mainly differed in the structure of the thermometer, and the material and thickness of the absorber.

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图 8 非复用SQUID的结构图, 右侧的单级SQUID将电流信号放大为电压信号, 左下侧的SQUID阵列将信号作进一步放大以降低在后端信号传输时杂散信号的干扰. 本图参考自文献[68]

Figure 8. Structure diagram of the none-multiplexed SQUID. The single-stage SQUID on the right amplifies the current signal into a voltage signal, and the SQUID array on the lower left amplifies the signal further to reduce the interference of stray signals when the back-end signal is transmitted. Referenced from Ref. [68] .

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图 9 复用SQUID的原理图. 左上图为TDM-SQUID, 通过控制超导开关来决定读取哪一通道. 右上图为CDM-SQUID, 通过控制超导开关和后期反编码实现所有通道同时读取. 左下图为FDM-SQUID, 通过频谱移动区分和鉴别不同像素TES的信号. 右下图是RF-SQUID, 通过微波频段的频谱移动鉴别不同像素的信号

Figure 9. Schematic diagram of multiplexed SQUID. The picture on the top left shows that TDM-SQUID, decides which channel to read by controlling the superconducting switch. The picture on the top right shows that CDM-SQUID, can read all channels at the same time by controlling the superconducting switch and post-reverse coding. The image below on the left shows that FDM-SQUID, distinguishes and discriminates the signals of different TES pixel through spectrum shift. The image below on the right shows RF-SQUID, distinguishes different pixels by the frequency spectrum shifting of the microwave band.

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图 10 一种高密度封装示意图, 主要包含高密度电缆、低温热沉、低温电路、转接插头、磁屏蔽、电磁屏蔽、红外遮光膜等结构

Figure 10. Schematic diagram of a high-density package, which mainly includes high-density cables, low-temperature heat sink, low-temperature electronics, transfer plugs, magnetic filed shielding, electromagnetic shielding, infrared filter etc.

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图 11 一种用于半导体型微量能器的JFET放大器结构示意图. 本图参考自文献[73]

Figure 11. Schematic diagram of the structure of a JFET amplifier for the semiconductor microcalorimeter. Referenced from Ref. [73].

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图 12 一个完整SQUID放大器结构示意图, SQUID 阵列一般置于4 K温区, 亦可根据实验需求将其放置于更低温区

Figure 12. Complete schematic diagram of the SQUID amplifier structure. The SQUID array is generally placed in the 4 K temperature region, but also can be placed in the lower temperature region according to the experimental requirements.

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图 13 不同X射线能谱仪的能量分辨率对比图, 同时给出了不同元素K线及L线的本征展宽用于直观比较各能谱仪的性能差异. 本图摘自文献[3]

Figure 13. Comparison diagram of energy resolution of different X-ray spectrometers. The natural line widths of K-line and L-line of different elements are given to directly compare the performance of different spectrometers. Referenced from Ref. [3].

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图 14 (a)能量分辨率、(b)探测效率及(c), (d)探测器种类对信噪比的影响, 图(c)和(d)为不同探测器在不同元素处性能比较. 本图参考自文献[2]

Figure 14. (a) Effects of energy resolution, (b) detection efficiency and (c), (d) the type of detector on the signal-to-noise ratio. Panel (c) and (d) compare the performance of different detectors at different element positions. Referenced from Ref. [2].

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图 15 利用低温X射线能谱仪测量到的两种氮化物的XES. 本图摘自文献[3]

Figure 15. Nitrogen X-ray emission spectrum (XES) of two kinds of nitrides measured by cryogenic X-ray spectrometer. Referenced from Ref. [3].

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图 16 利用低温X射线能谱仪测得的不同稀释浓度Fe元素样品的吸收谱

Figure 16. XAS spectrum of Fe elements in different concentrations of samples, which were measured by cryogenic X-ray spectrometer.

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图 17 上海科技大学低温X射线能谱仪研制团队采集得到的PM2.5样品能谱

Figure 17. Energy spectrum of PM2.5 samples collected by the Cryogenics X-ray Spectrometer Development team of Shanghai Tech University.

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图 18 利用低温X射线能谱仪与PIXE结合获得的超宽X射线谱. 本图引自文献[101]

Figure 18. Ultra-wide X-ray spectrum obtained by the combination of cryogenic X-ray spectrometer and PIXE. Referenced from Ref. [101].

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图 19 利用MMC对不同核素进行标定的误差对比情况, 两家研发单位的MMC结构、制冷系统乃至数据分析均相互独立, 仍然得到了十分一致的标定效果. 本图摘自文献[65]

Figure 19. Different MMC detectors from two research and development unit are used to compare the calibration errors of different nuclides. Both MMC structures, refrigeration systems and data analysis of these two research and development units are independent of each other, however still result in very consistent calibration results. Referenced from Ref. [65].

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表 1 针对软X射线波段几种X射线能谱仪的性能参数对比

Table 1. Comparison of performance parameters of several X-ray spectrometers in soft X-ray range.

Detector	Resolution $E_{\rm{FWHM}}$/eV	Count rate /cps	Efficiency (O)	P/B ratio
Ge (typical)	130	$3\times 10^5$	0.1	50∶1
Ge (best)	60	$3\times 10^4$	0.003	200∶1
STJ (typical)	20	$10^5$	$10^{-4}$	200∶1
STJ (best)	10	$10^6$	$10^{-3}$	1000∶1
Grating (typical)	0.5	$10^5$	$10^{-6}$	200∶1
Grating (best)	0.2	$10^6$	$10^{-5}$	1000∶1
Grating (best)	0.2	$10^6$	$3\times 10^{-4}$	200∶1

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表 2 安装于ATHENA卫星的低温X射线能谱仪关键参数

Table 2. Key parameters of cryogenic X-ray spectrometer installed on ATHENA satellite.

参数	设计指标	备注
能量范围/keV	0.2—12
能量分辨率	2.5 eV@7 keV
FOV/arcmin	5
像素尺寸/arcsc	< 5
单像素计数率/cps	0.25	保证80%的事例优于设计能量分辨率
非X射线背景/(cps·cm^-2)	$5^{-3}$

DownLoad: CSV

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