制作工艺误差对X射线组合折射透镜聚焦性能影响研究

乐孜纯; 张明; 董文; 全必胜; 刘魏; 刘恺

doi:10.7498/aps.59.6284

摘要

本文主要介绍对X射线组合折射透镜的制作工艺误差对其聚焦性能影响的研究结果. 首先给出采用深度X射线光刻技术制作的PMMA材料圆柱面型X组合折射透镜的工艺测试结果,得出制作工艺误差值,定性分析制作工艺误差对X射线组合折射透镜聚焦性能的影响. 然后根据实际的制作工艺误差建模,给出详尽的理论分析和定量的理论模拟结果. 最后在北京同步辐射装置(BSRF)上,构建基于PMMA材料的圆柱面型X射线组合折射透镜的微束聚焦实验系统,实际测试了有明显工艺误差和尽量消除工艺误差的两种X射线组合折射透镜的聚焦性能,给出实测结果

关键词:

Abstract

The compound X-ray refractive lens is a kind of optical components for X-rays focusing and imaging. This paper reports the authors’ research on focusing performance of the compound X-ray refractive lens with fabrication errors. Firstly SEM measurements of the semi-cylindrical PMMA compound X-ray refractive lens fabricated by means of deep X-ray lithography are performed, and accordingly the fabrication errors are measured. Then the theoretical analysis and simulations are done for the focusing performance of the compound X-ray refractive lens with the fabrication errors. Finally, X-ray microbeam experimental system is built on the 4W1A beamline of Beijing Synchrotron Radiation Facility (BSRF) for measuring the focusing performance of the semi-cylindrical PMMA X-ray refractive lenses we fabricated. And the focusing performances of the semi-cylindrical PMMA compound X-ray refractive lenses with and without distinct fabrication errors are measured and analyzed under 8 keV monochromatic X-rays.

Keywords:

作者及机构信息

1.
浙江工业大学理学院应用物理系,杭州 310032

基金项目: 国家自然科学基金(批准号:60672014 )和浙江省自然科学基金杰出青年团队项目(批准号:R107377)资助的课题.

Authors and contacts

1.
Department of Applied Physics, College of Sciences, Zhejiang University of Technology, Hangzhou 310023, China

参考文献

[1]	Snigirev A, Kohn V, Snigireva I, Lengeler B 1996 Nature 384 49
[2]	Aoki S, Ogata T, Sudo S, Onuki T 1992 Jpn.J. Appl. Phys. 31 3477
[3]	Beaz A 1961 J. Opt. Soc. Am. 51 405
[4]	Huang W, Li Y, Gu Y, Zhang J, You Y, ChunYu S, He Y, Lei A, Chen Z, Ma Y, Jin C 2003 Acta Phys. Sin. 52 809 (in Chinese)[黄文忠、李英骏、谷渝秋、张杰、尤永禄、淳于书泰、何颍玲、雷安乐、陈正林、马月英、金春水 2003 物理学报 52 809]
[5]	Le Z, Pan S 1999 Opt. Commun. 159 285
[6]	Kumakhov M, Komarov F 1990 Phys. Rep. 191 289
[7]	Chen B 2000 Acta Phys. Sin. 49 1933 (in Chinese)[陈宝振 2000 物理学报 49 1933]
[8]	Schroer C, Benner B, Gunzler T, Kuhlmann M, Zimprich C, Lengeler B, Rau C, Weitkamp T, Snigirev A, Snigireva I, Applenzller J 2002 Rev. Sci. Instrum. 73 1640
[9]	Schroer C 2001 Appl. Phys. Lett. 79 1912
[10]	Beguiristain H, Anderson I, Dewhurst C, Piestrup M, Cremer J, Pantell R 2002 Appl. Phys. Lett. 81 4290
[11]	Bohic S, Simionovici A, Snigirev A, Ortega R, Devès G, Heymann D, Schroer C 2001 Appl. Phys. Lett. 78 3544
[12]	Drakopoulos N, Zegenhagen J, Snigrev A, Snigireva I, Hauser M, Eberl K, Aristov V, Shabelnikov L, Yunkin V 2002 Appl. Phys. Lett. 81 2279
[13]	Zhu Y, Liang J, Liang Z, Huang X, Le Z, Yi F, Hou F, Huang W, Dong W, Wang W, Wang Z, Cui N 2009 Acta Phys. Sin. 58 1526 (in Chinese)[朱燕青、梁静秋、梁中翥、黄鑫华、乐孜纯、伊福廷、侯凤杰、黄万霞、董文、王维彪、王志立、崔乃迪 2009 物理学报 58 1526]
[14]	Le Z and Liang J 2003 J. Opt. A: Pure & Appl. Opt. 5 374
[15]	Le Z, Liang J, Dong W, Zhu P, Peng L, Wang W, Huang W, Yuan Q, Wang J 2007 Chin. Phys. 16 984
[16]	Liang J, Le Z 2005 Optics and Precision Engineering 13 60 (in Chinese)[梁静秋、乐孜纯2005 光学精密工程 13 60]

施引文献

[1]	Snigirev A, Kohn V, Snigireva I, Lengeler B 1996 Nature 384 49
[2]	Aoki S, Ogata T, Sudo S, Onuki T 1992 Jpn.J. Appl. Phys. 31 3477
[3]	Beaz A 1961 J. Opt. Soc. Am. 51 405
[4]	Huang W, Li Y, Gu Y, Zhang J, You Y, ChunYu S, He Y, Lei A, Chen Z, Ma Y, Jin C 2003 Acta Phys. Sin. 52 809 (in Chinese)[黄文忠、李英骏、谷渝秋、张杰、尤永禄、淳于书泰、何颍玲、雷安乐、陈正林、马月英、金春水 2003 物理学报 52 809]
[5]	Le Z, Pan S 1999 Opt. Commun. 159 285
[6]	Kumakhov M, Komarov F 1990 Phys. Rep. 191 289
[7]	Chen B 2000 Acta Phys. Sin. 49 1933 (in Chinese)[陈宝振 2000 物理学报 49 1933]
[8]	Schroer C, Benner B, Gunzler T, Kuhlmann M, Zimprich C, Lengeler B, Rau C, Weitkamp T, Snigirev A, Snigireva I, Applenzller J 2002 Rev. Sci. Instrum. 73 1640
[9]	Schroer C 2001 Appl. Phys. Lett. 79 1912
[10]	Beguiristain H, Anderson I, Dewhurst C, Piestrup M, Cremer J, Pantell R 2002 Appl. Phys. Lett. 81 4290
[11]	Bohic S, Simionovici A, Snigirev A, Ortega R, Devès G, Heymann D, Schroer C 2001 Appl. Phys. Lett. 78 3544
[12]	Drakopoulos N, Zegenhagen J, Snigrev A, Snigireva I, Hauser M, Eberl K, Aristov V, Shabelnikov L, Yunkin V 2002 Appl. Phys. Lett. 81 2279
[13]	Zhu Y, Liang J, Liang Z, Huang X, Le Z, Yi F, Hou F, Huang W, Dong W, Wang W, Wang Z, Cui N 2009 Acta Phys. Sin. 58 1526 (in Chinese)[朱燕青、梁静秋、梁中翥、黄鑫华、乐孜纯、伊福廷、侯凤杰、黄万霞、董文、王维彪、王志立、崔乃迪 2009 物理学报 58 1526]
[14]	Le Z and Liang J 2003 J. Opt. A: Pure & Appl. Opt. 5 374
[15]	Le Z, Liang J, Dong W, Zhu P, Peng L, Wang W, Huang W, Yuan Q, Wang J 2007 Chin. Phys. 16 984
[16]	Liang J, Le Z 2005 Optics and Precision Engineering 13 60 (in Chinese)[梁静秋、乐孜纯2005 光学精密工程 13 60]

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