搜索

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

光学薄膜诱导偏振像差对大数值孔径光学系统聚焦特性的影响

李旸晖 郝翔 史召邑 帅少杰 王乐

引用本文:
Citation:

光学薄膜诱导偏振像差对大数值孔径光学系统聚焦特性的影响

李旸晖, 郝翔, 史召邑, 帅少杰, 王乐

Effect of coating-induced polarization aberrations on the focusing properties in high numerical aperture optical system

Li Yang-Hui, Hao Xiang, Shi Zhao-Yi, Shuai Shao-Jie, Wang Le
PDF
导出引用
  • 大数值孔径光学系统表面光线的入射角较大, 会导致薄膜的偏振分离, 诱发偏振像差, 影响光学系统的聚焦特性. 本文利用矢量光衍射理论, 建立了光学薄膜各参量与光学系统聚焦光场的模型. 利用该模型分析了线偏振光入射时, 光学薄膜对光学系统聚焦光斑的扰动. 在此基础上, 探讨了应用了不同约束条件下得到的光学薄膜对最终聚焦光场的影响, 确定了减小薄膜扰动光学系统光斑的设计方法, 即额外添加透射率差和位相差的约束条件, 并且适当增加位相差约束的权重. 利用该方法优化设计的薄膜, 相比于普通减反膜而言, 对系统聚焦光场中心强度的提升可达约12.5%.
    The incident angles of the optical systems with high numerical apertures, such as lithography or microscope, are larger than those of normal ones. For these systems, polarized illumination is widely adopted. The coatings on their surfaces will make s and p polarization components of oblique incident light experience diverse amplitudes and phase modulations, and induce extra polarization aberrations. We apply the vectorial diffraction theory to assess the effects of coating-induced polarization aberrations on the focusing properties of these systems. By applying the generalized Debye integral, the relationship between the parameters of coating and electric field vector near the focal spot is established. Considering x linearly polarized light as the incident light field, we evaluate the potential influence of the coatings on the intensity and the full width at half maxium of focal spots. In the further discussion, we compare the results of different coatings when the various optimization goals are set, and certify that the phase difference caused by coating has more effect on focusing property. Based on this, the additional constraint conditions of coating design are proposed to suppress such disturbance, i.e. to properly increase relative weight of phase constraint conditions. With this proposed constraint conditions, we design and optimize an anti-reflection coating with low polarization aberrations. By applying this designing, the central intensity of focal spot can be enhanced by 12.5%, and the light energy utilization will be improved effectively.
    • 基金项目: 国家自然科学基金(批准号: 61405183, 61177050)资助的课题.
    • Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 61405183, 61177050).
    [1]

    Jasper H, Modderman T, Kerkhof M, C Wagner, Mulkens J, Boeij W de, Setten E van, Kneer B 2006 Opt. Microlith. XIX 6154 61541W-1

    [2]

    Yu J J, Zhou C H, Jia W, Wu J, Lu Y C 2014 J. Opt. Soc. Am. A 31 1059

    [3]

    Zhou G Q 2011 Chinese Phys. B 20 074203

    [4]

    Lai K F, Rosenbluth A E, Han G, Tirapu-Azpiroz J, Meiring J, Goehnermeier A, Kneer B, Totzeck M, Zeiss C, Winter L de, Boeij W de, Kerkhof M Vde 2007 Opt. Microlith. XX 6520 D5200

    [5]

    Flagello D G 2005 Adv. Microlith. Technol. 5645 44

    [6]

    Wang Z L, Zhou M, Gao C Y, Zhang W 2012 Chinese Phys. B 21 064202

    [7]

    Luo Z M, Chen S Z, Ling X H, Zhang J, Luo H L 2014 Acta. Phys. Sin. 63 13 (in Chinese) [罗朝明, 陈世祯, 凌晓辉, 张进, 罗海陆 2014 物理学报 63 13]

    [8]

    Hao X, Kuang C F, Wang T T, Liu X 2010 Opt. Lett. 35 3928

    [9]

    Hao X, Kuang C F, Wang T T, Liu X 2010 J. Opt-Uk.,12

    [10]

    Hao X, Kuang C F, Li Y H, Liu X 2012 Opt. Express 20 12692

    [11]

    Deng S H, Liu L, Cheng Y, Li R X, Xu Z Z 2010 Opt. Express 18 1657

    [12]

    Boruah B R, Neil M A A 2009 Opt. Commun. 282 4660

    [13]

    Boruah B R, Neil M A A 2006 Opt. Express 14 10377

    [14]

    Roichman Y, Waldron A, Gardel E, Grier D G 2006 Appl. Opt. 45 3425

    [15]

    Richards B, Wolf E 1959 Proc R. Soc. Lon. Ser-A 253 358

    [16]

    Quabis S, Dorn R, Eberler M, Glockl O, Leuchs G 2000 Opt. Commun. 179 1

    [17]

    Davidson N, Bokor N 2004 Opt. Lett. 29 1318

    [18]

    Li Y H, Shen W D, Zheng Z R, Zhang Y G, Liu X, Hao X 2011 J. Opt-Uk. 13 5

  • [1]

    Jasper H, Modderman T, Kerkhof M, C Wagner, Mulkens J, Boeij W de, Setten E van, Kneer B 2006 Opt. Microlith. XIX 6154 61541W-1

    [2]

    Yu J J, Zhou C H, Jia W, Wu J, Lu Y C 2014 J. Opt. Soc. Am. A 31 1059

    [3]

    Zhou G Q 2011 Chinese Phys. B 20 074203

    [4]

    Lai K F, Rosenbluth A E, Han G, Tirapu-Azpiroz J, Meiring J, Goehnermeier A, Kneer B, Totzeck M, Zeiss C, Winter L de, Boeij W de, Kerkhof M Vde 2007 Opt. Microlith. XX 6520 D5200

    [5]

    Flagello D G 2005 Adv. Microlith. Technol. 5645 44

    [6]

    Wang Z L, Zhou M, Gao C Y, Zhang W 2012 Chinese Phys. B 21 064202

    [7]

    Luo Z M, Chen S Z, Ling X H, Zhang J, Luo H L 2014 Acta. Phys. Sin. 63 13 (in Chinese) [罗朝明, 陈世祯, 凌晓辉, 张进, 罗海陆 2014 物理学报 63 13]

    [8]

    Hao X, Kuang C F, Wang T T, Liu X 2010 Opt. Lett. 35 3928

    [9]

    Hao X, Kuang C F, Wang T T, Liu X 2010 J. Opt-Uk.,12

    [10]

    Hao X, Kuang C F, Li Y H, Liu X 2012 Opt. Express 20 12692

    [11]

    Deng S H, Liu L, Cheng Y, Li R X, Xu Z Z 2010 Opt. Express 18 1657

    [12]

    Boruah B R, Neil M A A 2009 Opt. Commun. 282 4660

    [13]

    Boruah B R, Neil M A A 2006 Opt. Express 14 10377

    [14]

    Roichman Y, Waldron A, Gardel E, Grier D G 2006 Appl. Opt. 45 3425

    [15]

    Richards B, Wolf E 1959 Proc R. Soc. Lon. Ser-A 253 358

    [16]

    Quabis S, Dorn R, Eberler M, Glockl O, Leuchs G 2000 Opt. Commun. 179 1

    [17]

    Davidson N, Bokor N 2004 Opt. Lett. 29 1318

    [18]

    Li Y H, Shen W D, Zheng Z R, Zhang Y G, Liu X, Hao X 2011 J. Opt-Uk. 13 5

  • [1] 孙昇, 王超, 史浩东, 付强, 李英超. 分孔径离轴同时偏振超分辨率成像光学系统像差校正. 物理学报, 2022, 71(21): 214201. doi: 10.7498/aps.71.20220946
    [2] 刘保剑, 段微波, 李大琪, 余德明, 陈刚, 王天洪, 刘定权. 退火温度对Ta2O5/SiO2多层反射膜结构和应力特性的影响. 物理学报, 2019, 68(11): 114208. doi: 10.7498/aps.68.20182247
    [3] 李春艳, 陆卫国, 乔琳. 快速空间测角系统中偏振像差的分析与研究. 物理学报, 2018, 67(3): 030703. doi: 10.7498/aps.67.20171702
    [4] 张敏睿, 贺正权, 汪韬, 田进寿. 偏振双向衰减对光学成像系统像质影响的矢量平面波谱理论分析. 物理学报, 2017, 66(8): 084202. doi: 10.7498/aps.66.084202
    [5] 彭皓, 沈伟东, 杨陈楹, 章岳光, 刘旭. 宽波段波状多层膜结构偏振分束器的设计与优化. 物理学报, 2014, 63(13): 134212. doi: 10.7498/aps.63.134212
    [6] 王铮, 高春清, 辛璟焘. 高阶矢量光束高数值孔径聚焦特性的研究. 物理学报, 2012, 61(12): 124209. doi: 10.7498/aps.61.124209
    [7] 支绍韬, 章海军, 张冬仙. 基于大数值孔径环形光锥照明的超分辨光学显微成像方法研究. 物理学报, 2012, 61(2): 024207. doi: 10.7498/aps.61.024207
    [8] 刘超, 岑兆丰, 李晓彤, 许伟才, 尚红波, 能芬, 陈立. 关于部分偏振光能量传递和偏振态的光线椭圆分析方法. 物理学报, 2012, 61(13): 134201. doi: 10.7498/aps.61.134201
    [9] 袁文佳, 章岳光, 沈伟东, 马群, 刘旭. 离子束溅射制备Nb2O5光学薄膜的特性研究. 物理学报, 2011, 60(4): 047803. doi: 10.7498/aps.60.047803
    [10] 刘政, 王胜千, 黄林海, 饶长辉. 相位平移误差与子孔径自身像差对稀疏光学合成孔径系统成像质量的综合影响分析. 物理学报, 2011, 60(10): 100702. doi: 10.7498/aps.60.100702
    [11] 王兴军, 董斌, 周治平. Er硅酸盐化合物薄膜的相转变和光致发光特性研究. 物理学报, 2010, 59(5): 3554-3557. doi: 10.7498/aps.59.3554
    [12] 夏志林, 郭培涛, 薛亦渝, 黄才华, 李展望. 短脉冲激光诱导薄膜损伤的等离子体爆炸过程分析. 物理学报, 2010, 59(5): 3523-3530. doi: 10.7498/aps.59.3523
    [13] 薛晖, 郑臻荣, 顾培夫, 张锦龙, 沈伟东, 陈海星. 一种新型的低角度效应的滤波器. 物理学报, 2009, 58(6): 3983-3987. doi: 10.7498/aps.58.3983
    [14] 侯海虹, 孙喜莲, 田光磊, 吴师岗, 马小凤, 邵建达, 范正修. 利用总积分散射仪对光学薄膜表面散射特性的研究. 物理学报, 2009, 58(9): 6425-6429. doi: 10.7498/aps.58.6425
    [15] 刘明强, 李斌成. 光学薄膜样品的温度场和形变场分析. 物理学报, 2008, 57(6): 3402-3409. doi: 10.7498/aps.57.3402
    [16] 尚淑珍, 邵建达, 范正修, 赵祖欣. 热舟蒸发LaF3薄膜的紫外性能研究. 物理学报, 2008, 57(3): 1941-1945. doi: 10.7498/aps.57.1941
    [17] 张艳丽, 赵逸琼, 詹其文, 李永平. 高数值孔径聚焦三维光链的研究. 物理学报, 2006, 55(3): 1253-1258. doi: 10.7498/aps.55.1253
    [18] 陈潇潇, 李斌成, 杨亚培. 光学薄膜测量时平顶光束激励的表面热透镜理论模型. 物理学报, 2006, 55(9): 4673-4678. doi: 10.7498/aps.55.4673
    [19] 梁冠全, 韩 鹏, 汪河洲. 空间与频率双性能的薄膜光学滤波器. 物理学报, 2004, 53(7): 2197-2200. doi: 10.7498/aps.53.2197
    [20] 战元龄, 王立. 多层光学薄膜矢量散射的理论与实验研究. 物理学报, 1990, 39(2): 194-203. doi: 10.7498/aps.39.194
计量
  • 文章访问数:  5290
  • PDF下载量:  16681
  • 被引次数: 0
出版历程
  • 收稿日期:  2015-01-09
  • 修回日期:  2015-02-19
  • 刊出日期:  2015-08-05

/

返回文章
返回