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中国物理学会期刊

关于热生长SiO2薄膜厚度的测量

CSTR: 32037.14.aps.20.654

MEASUREMENT OF THE THICKNESS OF THERMALLY GROWN SiO2 THIN FILMS

CSTR: 32037.14.aps.20.654
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  • 在半导体硅器件的研究工作中,需要准确地测量和控制SiO2薄膜的厚度。由于干涉原理,SiO2薄膜在白光照射下呈现颜色。但薄膜厚度与颜色相应的单色光的波长并不成简单的函数关系。本文叙述了用干涉显微镜测量热生长SiO2薄膜厚度的方法。由测量结果得到SiO2薄膜的折射率以及SiO2和硅界面及空气和硅界面反射相移之差。并且测量了一组标准样品的薄膜厚度,列出了薄膜厚度与干涉颜色的对应关系。所得结果与从Rollet数据所推算的结果大致符合。样品厚度还包括了Rollet数据中所未包括的范围(3300—4200?)。

     

    In the research work of silicon devices, it is often needed to measure and control accurately the thicknesses of SiO2 thin films. Although it is well known that SiO2 thin films exhibit vivid colours under sunlight due to interference effects, yet there is no simple relationship between the thickness of the thin film and the wave length of the light corresponding to the observed colour. Described in this paper is a method for the measurement of the thicknesses of thermally grown SiO2 thin films. From the measured data, we have calculated the index of reflection of the SiO2 thin film as well as the phase shift difference between the SiO2-Si interface and the Si-air interface.By measuring the thicknesses of a set of SiO2 thin films of different colours, a chart is obtained which lists the thicknesses and the corresponding colours of the thermally grown SiO2 thin films. The results are found to be in fairly good agreement with that calculated from Roller's table. Our results include the thickness range of 3300-4200? which was not covered in Rollet's table.

     

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