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中国物理学会期刊

区域熔化点掺杂的数学分析

CSTR: 32037.14.aps.23.15-2

MATHEMATICAL ANALYSIS FOR POINT-DOPING IN ZONE MELTING

CSTR: 32037.14.aps.23.15-2
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  • 本文对区域熔化点掺杂过程进行了详细的数学分析。得到了点掺杂区熔后杂质沿锭长分布的一系列普遍公式。在本文研究的范围内,利用这些公式,不难写出任意次区熔后锭条上的杂质分布,而不受区熔次数和掺杂点数目之限制。作为一个特例,具体计算了k=0.35,四点掺杂,三次区熔后杂质沿锭长的分布情况,得到:当各掺杂点之位置与掺杂量选取适当时,在总锭长为21.5个熔区长度的料锭中,其16个熔区长度范围内的杂质浓度相对起伏可小于±3.0%。

     

    The mathematical analysis for point-doping in zone melting has been given in detail. A series of general formulae of impurity concentration distribution along the ingot after point-doping zone melting has been derived. In this paper, within the range of our investigation, it is not at difficult, by means of these formulae, to obtain the impurity concentration distribution in an ingot after any number of passages of zone melting, without being restricted by the number of passages of zone melting and the number of doping points.As an example, the impurity concentration distribution after three passages of zone melting for the case of к = 0.35 and four doping points is specifically calculated. It is shown that, if the position and doping amount of each doping point are suitable, for an ingot of 21.5 melting zone lengths, the relative fluctuation of impurity concentration in 16 lengths may be less than ?3.0%.

     

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