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中国物理学会期刊

关于电离真空规测量上限非线性的探讨

CSTR: 32037.14.aps.28.250

AN APPROACH TO THE NONLINEARITY OF IONIZATION VACUUM GAUGE AT UPPER PRESSURE LIMIT

CSTR: 32037.14.aps.28.250
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  • 在电离真空规的线性测量上限部分,离子流随着压强上升而衰降。这一非线性规律符合非自持放电的理论,并可导出对应于离子流极大值的压强=E/C,其中E为电极间电场强,C为一常数。因此线性测量上限可通过E的增强而得到拓延。通过实验,设计了四种电极间具有较强电场同时又保持较低的灵敏度的电极结构,它们的线性测量上限分别由原来的10-1托延伸到1托,2托,6托和10托。实验曲线和理论计算数值基本相符。

     

    Beyond the upper limit of the linear region of an ionization gauge, there is a falloff in the ion current with the increase of the measured pressure. This nonlinear behavior is to be expected by the theory of non-self-sutaining discharge, from which it follows that the pressure corresponding to the maxium of ion current may be expressed as p=E/C, where E is the field strength between the electrodes and C is a constant. Thus the upper limit, of the linear region will be extended as E increases.Four versions of gauge-electrodes configuration capable of giving higher field strength as well as maintaining lower sensitivity have been under test, leading to the result that the upper limit of linearity have extended from 10-1 Torr ab originc up to 1 Torr, 2 Torr, 6 Torr and 10 Torr, respeetively. There is satisfactory agreement between these experimental data and the calculated values based on the above theory.

     

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