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中国物理学会期刊

Si,GaAs和LiNbO3单晶的堵塞效应

CSTR: 32037.14.aps.28.324

THE BLOCKING EFFECT OF Si, GaAs AND LiNbO3 SINGLE CRYSTALS

CSTR: 32037.14.aps.28.324
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  • 我们利用背散射方法得到Si,GaAs和LiNbO3单晶堵塞图,以及GaAs单晶110,100和112面堵塞半角ψ1/2值.并得到因离子注入受损伤Si片110面堵塞坑深度随注入剂量增加而变浅的结果。作为对实验装置和方法的检验,我们也得到了Si单晶堵塞图和测量了Si单晶110,111和100晶面堵塞半角ψ1/2值。

     

    By making use of the back scattering method Si, GaAs and LiNbO3 Single Crystal blocking patterns were obtained and GaAs single crystal 110, 100 and 112 plane blocking halfangle ψ1/2 values were estimated. We have found that the depth of the 110 plane blocking dip of Si slice damaged due to ion implanting becomes shallow when implantation dose increases. In order to check the experimental apparatus and the method, we have also obtained Si single crystal blocking pattern and measured the values of Si single crystal 110, 111 and 100 crystal plane blocking halfangles

     

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