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中国物理学会期刊

二元合金成份的无标样X光能谱定量分析

CSTR: 32037.14.aps.29.485

THE QUANTITATIVE EDS ANALYSIS OF THE CONSTITUENTS OF BINARY ALLOYS WITHOUT STANDARD SAMPLES

CSTR: 32037.14.aps.29.485
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  • 一般用电子探针对合金成份进行定量分析时都用标样进行对比。本文提出了一个不用标样的二元合金成份的定量分析方法。利用扫描电子显微镜-X光能谱分析装置同时测定二元合金(Cu-Ga,GaAs)中二元素的Ka光子数比值后,由简化的入射电子能量损失公式和X光激发截面公式并考虑了二次荧光效应后,可计算出二元合金的成份。当入射电子的过电压保持在2—3时,得到和实际成份一致的结果。利用上述简化模型对文献中不同纯元素特征X光的“仪器灵敏度”进行了计算和讨论。

     

    In general, the quantitative electron probe microanalysis is based on comparisons with standard samples. In this article, a method of the quantitative analysis of binary alloys without reference to standard samples is introduced. After simultaneous measurements of the ratios of the Ka photons of two elements in the binary alloys (Cu-Ga, GaAs) in SEM-EDS equipment, the constituents of the binary alloys are calculated from a simplified formula for the energy loss of the incident electrons, the X-ray excitation cross-section and the secondary fluorescence. When the overvol-tage of the incident electrons is kept in the range 2-3, the calculated results show good agreement with the actual constituents. The "instrument sensitivity" of the characteristic X-ray of the pure elements determined in the literature is calculated and discussed by using this simplified model.

     

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