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中国物理学会期刊

高斯轨迹参量的线性变换对于电子光学象差的影响

CSTR: 32037.14.aps.30.472

ON THE LINEAR TRANSFORMATIONS OF GAUSSIAN TRAJEC-TORY PARAMETERS AND THEIR INFLUENCE UPON ELECTRON OPTICAL ABERRATIONS

CSTR: 32037.14.aps.30.472
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  • 本文从比较普遍的观点出发,采用矢量形式描写高斯轨迹,运用矩阵形式表示象差,从而讨论了普遍的高斯轨迹参量线性变换下的电子光学系统的三级象差和象差系数及其偏微商。由此得到了电子光学广义的Fraunhofer条件(即消除各向同性和各向异性彗差的条件),证明了在此条件下,象散和场曲取极值或稳定值。利用上述的普遍公式和结果,讨论了固定束和扫描束电子光学系统中光阑位置变化的影响,还讨论了阴极发射系统中磁浸没的影响。

     

    In this paper, we describe electron trajectory by vector form and express aberra-tions in matrix form. According to the more general viewpoint, we discuss some general linear transformations of gaussian trajectory parameters. The third order aberrations, aberration coefficients and their partial differentials in an electron optical system undergone these transformations are derived. Therefore the general electron optical Fraunhofer conditions for correcting isotropic and anisotropic coma are obtained. It is shown that under this condition, astigmatism and field curvature have extreme or stationary values. According to these results, some concrete problems are discussed; for example, the effect of aperture position on aberrations in the fixed or scanned electron beam systems, and the effect of magnetic immersion on aberrations in the emission electron system (cathode lens).

     

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