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中国物理学会期刊

复合的电子束扫描系统象差的动态校正

CSTR: 32037.14.aps.31.37

DYNAMIC ABERRATION CORRECTION IN A COMBINED SCANNING ELECTRON BEAM SYSTEM

CSTR: 32037.14.aps.31.37
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  • 本文在文献1的基础上讨论了复合的电子束扫描系统象差的动态校正问题。讨论了采用不同的电磁多极场作为动态校正器的可能性。推导了圆形校正透镜、偏转校正场和四极、六极校正场引起的附加象差的公式。由此证明了由这种圆形校正透镜、偏转校正场和四极校正场等组成的动态校正系统在一定条件下可以消除复合的电子束扫描系统中大多数的三级偏转象差。

     

    Based on the results of the previous paper 1, the dynamic aberration correetion in a combined scanning electron beam system is studied. The possibility of dynamic aberration correction by using electro-magnetic multipole fields is discussed. The formulas for calculating aberrations, caused by round and multipole correctors, are derived.Thus we show that in a combined scanning electron beam system most of the third order deflection aberrations may be eliminated by properly using a dynamic aberration correction system, consisting of round lens, deflector and quadrupole devices.

     

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