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中国物理学会期刊

Au在Si-Si3N4界面的电学效应

CSTR: 32037.14.aps.33.662

THE ELECTRICAL EFFECTS OF GOLD AT THE SILICON NITRIDE-SILICON INTERFACE

CSTR: 32037.14.aps.33.662
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  • 本文系统地研究了Au在Si-Si3N4界面的电学效应及其热处理行为,对MNS结构进行了电子能谱分析,并探讨了Au在界面处的作用机制。

     

    In this paper, the electrical effects of gold at the silicon nitride-silicon interface and the heat treatment behaviour of these effects are studied systematically. The results of electron spectroscopy analyses of the MNS structure are also presented. In addition, the action mechanism of gold at this interface is investigated.

     

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