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中国物理学会期刊

中子辐照氢气氛生长硅的红外吸收

CSTR: 32037.14.aps.34.849

INFRARED ABSORPTION OF NEUTRON-IRRADIATED FZ-Si GROWN IN HYDROGEN ATMOSPHERE

CSTR: 32037.14.aps.34.849
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  • 用傅里叶变换红外吸收光谱技术测量了中子辐照氢气氛生长区熔硅在1800—2300cm-1和400—1200cm-1频段的吸收光谱。给出了较强谱带的退火曲线。与质子注入硅的红外光谱及中子辐照氢气氛生长硅的深能级瞬态谱结果相比较,讨论了相应于一些谱带的硅氢中心的可能结构。

     

    Infrared absorption spectra of neutron irradiated FZ-Si grown in hydrogen atmosphere have been measured in wavenumber ranges 1800—300 em-1 and 400—200cm-1 by FTIR. The annealing behaviour of stronger absorption bands has been shown. By comparing with spectral results of proton implanted silicon measured by IR and neutron irradiated FZ-Si grown in hydrogen atmosphere measured by DLTS, the possible constructions of H-related centers are discussed.

     

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