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中国物理学会期刊

溅射相关的Pb97.4Sn2.6合金表面现象研究

CSTR: 32037.14.aps.35.1646

SPUTTERING RELATED PHENOMENA ON THE SURFACE OF Pb97.4Sn2.6 ALLOY

CSTR: 32037.14.aps.35.1646
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  • 本文对Pb97.4Sn2.6合金表面在溅射时所产生的一些现象进行了研究。实验在室温下,利用PHI-590型扫描俄歇微探针进行。根据理论计算结果对实验数据进行分析后,观察到了溅射增强扩散效应。当Ar+离子能量为5千电子伏,离子流密度为70微安/厘米2时,测得锡在合金中的扩散系数为10-15厘米2/秒量级,影响层厚度约为200埃。

     

    The surface phenomena of Pb97.4Sn2.6 alloy under the Ar+ ion sputtering have been investigated using PHI-590 scanning Auger microprobe at room temperature. Theoretical analyses of experimental data showed that the ion-bombardment-enhanced diffusion occured with diffusion coefficient up to 10-15 cm2/s and the thickness of alter layer was about 260 ?. The possible explanation is given.

     

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