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中国物理学会期刊

a-Si在不同衬底材料表面凝聚和生长的状况

CSTR: 32037.14.aps.36.17

THE CONDITIONS OF CONDENSATION AND GROWTH OF a-Si FILMS ON VARIOUS SUBSTRATE MATERIAL SURFACE

CSTR: 32037.14.aps.36.17
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  • 本文报道了应用SEM观察a-Si在不同衬底材料表面凝聚和生长的状况,并对有关现象作了相应的解释。

     

    In this paper, we report the observed conditions of condensation and growth of a-Si on different kinds of substrate materials surfaces studied with the SEM technology. Explanations about the phenomena are given.

     

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