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中国物理学会期刊

氢化非晶硅激光结晶温场控制模型

CSTR: 32037.14.aps.36.74

TEMPERATURE FIELD CONTROL MODEL OF LASER CRYSTALLIZATION OF HYDROGENATED AMORPHOUS Si

CSTR: 32037.14.aps.36.74
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  • 氢化非晶硅在低速激光扫描下,可以得到四个结晶区,即微晶区,固相结晶区,过冷液相结晶区和液相激光结晶区。对氢化非晶硅激光结晶提出了一种温场控制模型,可用以解释结晶特点,揭示结晶过程。

     

    During Ar+ laser scanning at low speeds, four kinds of crystallization zone appear on a-Si:H films deposited on quartz substrates. They are microcrystalline phase zone, solid phase zone, supercooled liquid phase zone and liquid phase laser zone, grown by liquid phase transverse epitaxies. The temperature field control model of laser crystallization of hydrogenated amorphous silicon has been proposed, by which the crystallization processes and their features can be explained.

     

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