The process of the lattice damage and its development in the Hg1-xCdxTe crystal under electron irradiation with high dose and high energy have been studied at lattice level by high resolution electron microscopies. The results indicate that Hg1-x CdxTe lattice damage was caused by the deformation of the (Hg, Cd)Te4 tetrahedra due to the strong electron irradiation. These deformations could be seen on the 111 plane and they developed along the 111 plane as steps. Moreover, a new superlattice with larger parameter of unit-cell was observed along the 110 direction.