The experimental method and facilities for studing surface and interface atomic structure by MeV ion scattering are described. The crystal preparation and cleaning procedure of Al (100) are presented. The MeV ion channeling and scattering experiments indicate the themal vibration amplitude of Al(l00) surface atom is 1.2-1.3 times greater than that of bulk atoms. The relaxation of Al(l00) first layer atom is less then -0.05?.