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中国物理学会期刊

非相干光源用于“核-环比”法测量表面粗糙度

CSTR: 32037.14.aps.39.10

"CORE RING-RATIO" METHOD FOR SURFACE ROUGHNESS MEASUREMENT WITH INCOHERENT LIGHT SOURCE

CSTR: 32037.14.aps.39.10
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  • 本文将文献1-5的用激光测量表面粗糙度的“核-环比”法推广到采用其他非相干光源,给出测量原理的定量公式及测量装置的结构框图。

     

    This work extends the "Core-Ring-Ratio" method for surface roughness mea-surement1-5 from the case using coherent light source to the case using incoherent source (i. e., extended non-monochromatic light source). The formulas of the principle of measurement and the schematic diagram of the measuring device are presented.

     

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