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中国物理学会期刊

Fe离子注入多晶Al2O3的光电子能谱研究

CSTR: 32037.14.aps.40.857

X-RAY PHOTOELECTRON SPECTROSCOPY STUDY OF Fe ION IMPLANTED POLYCRYSTALLINE Al2O3

CSTR: 32037.14.aps.40.857
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  • 本文应用光电子能谱(XPS)方法分析Fe离子注入多晶Al2O3样品中各离子的存在状态。通过微机对谱峰进行高斯拟合处理,得出注入离子Fe不同价态的相对含量。

     

    In this paper, all ionic states in the polycrystalline Al2O3 implanted with Fe ions are studied by X-ray photoelectron spectroscopy. The Gaussian decomposition of spectra is done by computer, and the relative content of various valence of implanted Fe ion is obtained.

     

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