The angular distributions of atoms sputtered from Ni-50Wt%Ti, Fe-30Wt%W and Ag-50Wt%Cu alloys by 27keV Ar+ ions bombardment nave been masured. It has been found that Ti, Fe and Ag atoms were sputtered preferentially at small angles. The sputtered surfaces have been analyzed by SEM combined with EPMA. It has been showed that all the surface topographies of three samples consisted of two different parts i.e. convex and concave regions, corr responding dif ferent components being richer at different region. A model has been suggested to explan this phenomenon.