Using a special optical transmission system, excimer laser beam can scan on the superconducting target, scanning laser beam ablates the target resulting in deposition of superconducting films. The thickness uniformity of large area superconducting films can be improved by this method. The superconducting films on 12mm×33mm Y-ZrO2 substrates show good thickness uniformity, zero resistance temperature Tc≥90K, critical current density at 77K and zero field Jc≥l×106A/cm2.