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中国物理学会期刊

晶粒尺寸对薄膜电阻率温度系数的影响

CSTR: 32037.14.aps.43.297

EFFECT OF GRAIN SIZE ON TEMPERATURE COEFFICIENT OF RESISTIVITY OF Pd THIN FILMS

CSTR: 32037.14.aps.43.297
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  • 报道了Pd薄膜电阻率温度系数(TCR)随不同薄膜厚度和不同退火温度的变化.实验结果表明:薄膜TCR值远小于体材料的值,且对晶粒尺寸有一定的依赖关系;薄膜晶粒尺寸越大,其TCR值也越大。采用晶粒间界散射的二流体模型对此结果进行了讨论。

     

    The temperature coefficient of resistivity (TCR) of Pd thin film with different thicknesses and annealled at different tempertures has been investigated. The experi-mental results indicated that the TCR value of thin films is much smaller than that of bulk material and it also depcnds on grain size of the thin films. It was found that the TCR is higher for larger grain size. The result is explained readily by using the two-fluid model.

     

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