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中国物理学会期刊

低压-金属有机物汽相外延生长的Ga1-xInxAs/InP激光器中深能级的研究

CSTR: 32037.14.aps.43.779

DEEP LEVEL STUDIES OF Ga1-xInxAs/InP LASERS GROWN BY LP-MOVPE

CSTR: 32037.14.aps.43.779
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  • 应用深能级瞬态谱(DLTs)技术详细研究低压-金属有机物汽相外延(LP-MOVPE)生长的Ga0.47In0.53As/Inp量子阱、宽接触和质子轰击条形异质结激光器中的深能级。样品的DLTS表明,在宽接触激光器的i-Ga0.47In0.53As有源层里观察到H1(Ev+0.09eV)和E1(Ec-0.35eV)陷阱,它们可能分别与样品生长过程中扩散到i-Ga0.4

     

    The deep levels of Ga0.47In0.53As/InP lasers with broad, proton-bombarded stripe contacts and SQW (Single Quantum Well) grown by LP一MOVPE have been studied using DLTS (Deep Level Transient Spectroscopy) technique. DLTS Spectra of samples show that hole traps H1(Ev+0.09eV) and H2(Ev+O.11eV) and electron traps El (Ev-0.35eV) and E2 (Ev-0.42eV) present in Ga0.47In0.53As layer of lasers with broad and proton-bombarded stripe contacts, respectively. These traps may be related to Zn introduction in Ga0.47In0.53 As layer, native defect and interactions between H1 and damage induced by proton-bombardment, respectively. They may spatially localize in Ga0.47In0.53As layer and interface regions of discontinous variation In mole fraction of Ga1-xInx As layer with XIn=0.53.

     

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