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中国物理学会期刊

直流空心阴极放电中鞘层区电子的输运过程

CSTR: 32037.14.aps.43.950

ELECTRON TRANSPORT PROCESS IN CATHODE SHEATH OF HELIUM dc HOLLOW CATHODE GLOW DISCHARGE PLASMA

CSTR: 32037.14.aps.43.950
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  • 采用蒙特-卡洛方法对空心阴极放电中鞘层区电子的输运过程进行了研究,电子在鞘层区被非均匀电场加速,两次碰撞之间的步长是由电子与中性粒子的碰撞频率确定。模型中三种碰撞截面积是由实验和理论数据拟合而来。研究了电子平均能量、电子密度和电离系数在径向的分布。电子能量的空间分布结果与实验很好地符合。

     

    In this paper, the electron transport process in cathode sheath of helium dc hollow cathode glow discharge is studied by using Monte Carlo simulation. The electron is accelerated between collisions by the non-uniform electric field of the hollow cathode sheath. The electron free flying time between collisions is determined by collision frequency of electron with neutral particle. The experimental data of collision cross section are fitted to semi-experience expressions. The electron mean energy and spatial energy distribution, and other parameters distribution are studied. The results are in good agreement with experimental ones.

     

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