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提出了以X射线衍射测量连续过渡型多晶物相深度分布的方案.该方案在入射角大于全反射角的常规条件下,实现了严格的真实尺度下的物相定量深度分布测量.以计算谱对方法及程序的正确性进行了验证,并用实际样品对方法的可行性进行了验证.A new X-ray powder diffraction method is reported to test phase depth distribution quantitatively and non-destructively. In case of the incident angle is larger than the total reflection critical angle, it is possible to quantitatively measure the polycrystalline phase depth profile in real scale. It can be used to the sample of continuous phase depth distribution. The method was verified with computer simulation and experiment of practical sample.







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