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中国物理学会期刊

负偏压射频放电过程的流体力学模拟

CSTR: 32037.14.aps.45.1138

HYDRODYNAMICS SIMULATION OF RF DISCHARGE COURSES WITH NEGATIVE BIAS

CSTR: 32037.14.aps.45.1138
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  • 采用流体力学方法研究了负偏压射频放电的物理过程,计算了带电粒子密度及电场的时空分布,分析了在不同的近似条件下,离子动量平衡方程中各项的贡献。

     

    In this paper , we have analysed the physical procedures of RF discharges with negative bias , using the hydrodynamics method, and have calculated the spatiotemporal distributions of charged par-ticals and the electric field. The contributions of each terms in momentum-balance equation of ions are also discussed under different approximations.

     

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