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用掠入射X射线衍射法观察到钛酸铅多晶铁电薄膜表面层与体内的相变温度不同,表面层的结构参数也有异于体内;唯象地把多晶铁电薄膜抽象为一个表面层为细晶粒、低应变层,体内为粗晶粒、高应变层的两层结构,根据应力和晶粒尺寸效应对铁电相变的影响,解释了钛酸铅多晶铁电薄膜的相变特征It is experimentally investigated by glancing angle X-ray diffraction (GAXRD) that the phase transition temperature and structure parameters of surface layer and differing from those of bulk layer in polycrystalline PbTiO3 ferroelectric thin film. The polycrystalline ferro-electric thin film is phenomenologically treated as a double layers structure: the surface layer is characterized as fine crystalline and low stressed, the bulk layer is characterized as large crystalline and high stressed. According to the influences of size and stress effects, the feature of phase transition of PbTiO3 polycrystalline ferroelectric thin film is described.







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