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中国物理学会期刊

碲镉汞表面钝化新方法

CSTR: 32037.14.aps.46.1400

A NEW METHOD OF SURFACE PASSIVATION FOR MERCURY CADMIUM TELLURIDE

CSTR: 32037.14.aps.46.1400
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  • 提出了脉冲式阳极氧化生长碲镉汞表面钝化膜的方法.自行设计研制成功一种新颖的脉冲式阳极氧化装置,获得了优于传统恒流方式生长的碲镉汞阳极氧化膜界面,并结合扫描电子显微镜、俄歇电子能谱和光电导衰退法观测了脉冲氧化对碲镉汞表面的影响.探索到一种能够使表面复合速度降得最低的最佳脉冲氧化条件.对脉冲氧化膜的生长机制进行了分析讨论

     

    We have developed a new method of passivating the surfaces of mercury cadmium telluride (MCT) by growing anodic oxidation films in a pulse mode. A novel equipment of pulse anodic oxidation was designed and developed successfully. The interface obtained by this method was superior to that grown by the traditional constant current. The influence of pulse oxidation on MCT surface was investigated by means of SEM, AES and photoconductivity decay. The optimum pulse oxidation condition to reduce the surface recombination velocities has been investigated. The mechanism of the growth of pulse oxidation film is analyzed and discussed.

     

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