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考虑了短波长软X射线多层膜的设计问题,比较了一、二、三级布喇格衍射峰设计的反射率结果,分析了反射率与周期厚度及金属层在周期中的比率的关系.本文认为,在存在不连续金属膜层的情况下,用布喇格衍射峰的二级次设计,有助于获得实测的反射率.给出了利用磁控溅射方法沉积的Mo/Si多层膜在4.47nm处同步辐射测量,在60°入射角下获得8.5%实测反射率的结果.This paper discussed a method of designing soft X-ray multilayers for shorter wavelengths and showed that a difference between the designing of longer wavelength soft X-ray multilayers and that of the shorter one.For the latter,the minimum continuous thickness of the metal layer have to be considered.The method of second order designing could be a way to deposit high-quality multilayer mirrors for shorter wavelengths.The measured reflectivity of a Mo/Si multilayer for 4.47nm is also reported.







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