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利用高分辨电子显微术,对在GaP基体上由分子束外延生长六角GaN晶体薄膜中的晶体缺陷结构进行了研究.实验中发现了GaN薄膜外延生长过程中产生的一种典型早期刃型位错结构.此晶体缺陷位于一大块GaN晶粒内部,其外观类似于一段(1120)晶界.它由一条(1120)高能孤立晶界段及其两端的两个1/6[1120]不完全刃型位错组成.从大晶格失配材料之间分子束外延生长的机理上对这种缺陷结构的形成进行了解释.A structural defect of incipient edge dislocation in epitaxial wurtzite GaN film is confirmed in this paper. The defect is observed as an isolated (1120) boundary segment within one large perfect crystal area by high-resolution electron microscopy. It has the local atom configuration as a part of (1120) high-energy like-atom bonding boundary together with two 1/6[1120] partial edge dislocations at its two ends. The origin of the defect is explored from the mechanism of epitaxial growth.







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