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中国物理学会期刊

快速热退火引起GaAs/AlGaAs双量子阱中铝原子的扩散研究

CSTR: 32037.14.aps.47.945

DIFFUSION OF ALUMINUM IN DOUBLE QUANTUM WELL STRUCTURE UPON RAPID THERMAL ANNEALING

CSTR: 32037.14.aps.47.945
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  • 用分子束外延生长了GaAs/AlGaAs双量子阱激光器结构样品,并对不同温度快速热退火导致量子阱组分无序即阱和垒中三族元素的扩散过程进行了实验和理论研究.用光荧光技术测量退火样品的n=1量子阱能级跃迁峰值位置,结果表明退火前后样品量子阱能级位置发生蓝移,蓝移量随温度的提高而增大.对退火过程中GaAs/AlGaAs量子阱中三族元素的扩散过程进行了理论分析,并与实验结果相比较,获得了不同退火温度下铝原子的扩散系数和扩散过程的激活能.950℃,30s退火条件下,铝原子的扩散系数为6.6×10-16 

    We have investigated theoretically and experimentally the impurity-free vacancy induced disordering for GaAs/AlGaAs double quantum well laser structure grown by MBE with capped SiO2 by repid thermal annealing. The position of the photoluminescence peaks, due to the n=1 electron to heavy-hole transition, was measured before and after annealing the samples. As a result, the samples annealed rapidly show blue shift in the position of photoluminescence peaks and the magnitude of shift increases with increasing temperature. We analyzed theoretically the Al-Ga interdiffusion process in GaAs/AlGaAs quantum well structure and the experimental energy shifts were compared with a theoretical model to obtain the diffusion coefficient of aluminum into the quantum well at different temperatures and the activation energy of aluminum diffusion process. The aluminum diffusion coefficient in the sample annealed at 950 ℃ for 30 s is 6.6×10-16 cm2/s. The activation energy found is 5.0 eV.

     

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