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类金刚石薄膜的性质、应用及制备

物理学报, 1999, 48(6): 1095-1102.
DOI: 10.7498/aps.48.1095
CSTR: 32037.14.aps.48.1095

PROPERTY, APPLICATION AND PREPARATION OF DIAMOND-LIKE FILM

Acta Phys. Sin., 1999, 48(6): 1095-1102.
DOI: 10.7498/aps.48.1095
CSTR: 32037.14.aps.48.1095
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  • 摘要

    介绍了类金刚石薄膜的结构特征，并详细讨论了采用物理化学气相沉积方法制备类金刚石薄膜过程中各相关参数之间的关系以及对薄膜结构和性质的影响.

     

    Abstract

    We present the structure features of diamond-like films, discuss the relation between the coefficients in the preparation of diamond-like films and analyse how these coefficients affect the structure and property of the films in detail.

     

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