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中国物理学会期刊

N型槽栅金属-氧化物-半导体场效应晶体管抗热载流子效应的研究

CSTR: 32037.14.aps.49.1241

STUDY ON HOT-CARRIER-EFFECT FOR GROOVED-GATE N-CHANNEL METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT-TRANSISTOR

CSTR: 32037.14.aps.49.1241
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  • 用二维器件仿真软件MEDICI模拟分析了N型槽栅金属-氧化物-半导体场效应晶体管的热载流 子特性及其对器件性能所造成的损伤,并与相应常规平面器件进行了比较,同时用器件内部 物理量的分布对造成两种结构器件特性不同的原因进行了解释.结果表明槽栅器件对热载流 子效应有明显的抑制作用,但槽栅器件对热载流子损伤的反应较平面器件敏感.

     

    In this paper,the hot-carrier effect in grooved gate NMOSFET and the device degr adation induced by it were simulated using device simulator MEDICI,and compared with those of counter conventional planar device.The hot-carrier effect and the device degradation were explained using the distribution of some internal physic al parameters.The simulation results indicated that hot-carrier effect was stron gly suppressed in grooved gate MOSFET,while grooved gate MOSFET's performance wa s sensitive to hot carrier.

     

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