The ZrO2(Y2O3) thin film materials are studed b y slow positron beam.The ZrO2(Y2O3) thin film m aterials are made by r f puttering without biasing,heat treatment of liner being at 300℃ in pure Ar atmosphere.We discovered that the defects distribute themse lves in different depths of the thin film.The tempearture influences the distril ution of defects in the YSZ thin films.And we discuss briefly the method to make dense and high-quality YSZ films.