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中国物理学会期刊

激光分子束外延BaTiO3薄膜最顶层表面原子平面与薄膜生长机理

CSTR: 32037.14.aps.49.1878

TOPMOST SURFACE AND GROWTH MECHANISM OF BaTiO3 THIN FILM GROWN BY LAS ER MOLECULAR BEAM EPITAXY

CSTR: 32037.14.aps.49.1878
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  • 用激光分子束外延技术在SrTiO3(001)衬底上外延生长了高质量的BaTiO3薄膜,薄膜的生长过程由反射式高能电子衍射仪(RHEED)原位实时监测,表明薄膜具有 二维层状生长模式.薄膜的晶体结构和表面形貌分别由X射线衍射和原子力显微镜表征,显示 该薄膜为完全c轴取向四方相晶体结构,其表面具有原子尺度光滑性.采用角分辨X射线光电 子谱技术(ARXPS),研究了BaTiO3薄膜表面最顶层原子种类和排列状况.结果表 明,BaTiO3

     

    The BaTiO3 thin film was grown epitaxially on SrTiO3(001) substrate by laser molecular beam epitaxy (laser-MBE). The film growth process w as monitored by in situ reflection high-energy electron diffraction (RHEED), the regular RHEED intensity oscillation from the 0th-Bragg reflection shows an unit cell layer-by-layer growth mode. The crystalline structure and the surface morp hology of the laser-MBE BaTiO3 film were characterized by X-ray diffr action (XRD) and by atomic force microscopy (AFM), respectively. The XRD and AFM results show that laser-MBE BaTiO3 film exhibit the tetragonal c-axi s oriented structure and an atomically smooth surface with a root mean square su rface roughness of 016nm. The topmost surface of the film was studied by angl e-resolved X-ray photoelectron spectroscopy (ARXPS), indicating the laser-MBE Ba TiO3 film is predominantly terminated with TiO2 atomic pla ne. The topmost surface of laser-ablated BaTiO3 film was also analyze d. The film growth mechanism was investigated in atomic scale.

     

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