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中国物理学会期刊

空心阴极直流放电的二维自洽模型描述和阴极溅射分析

CSTR: 32037.14.aps.50.1528

SELF-CONSISTENT DESCRIPTION OF A DC HOLLOW CATHODE DISCHARGE AND ANALYSIS OF CATHODE SPUTTERING

CSTR: 32037.14.aps.50.1528
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  • 建立了空心阴极放电的二维自洽理论模型,理论研究了气压为50—120Pa,电压为150—300V的范围内Ar空心阴极放电特性、粒子密度和电离速率空间分布,特别考察了影响阴极溅射分布有关因素:阴极面上的电场、离子流和离子密度的沿阴极截面的空间分布.研究结果不仅证实了在所讨论的范围内,空心阴极效应明显存在而且发现归一化电离速率的空间分布形状强烈依赖于气压.通过研究电场、离子流和离子密度的空间分布解释了空心阴极溅射型离子激光器中不均匀阴极溅射的现象来源于阴极面附近的电场、离子流和离子密度的不均匀分布

     

    The characteristics of DC hollow cathode discharge and cathode sputtering was investigated by means of a two dimensional hybrid model, combing Monte Carlo simulation of the motion of fast electrons and a fluid description of slow electrons and positive ions. The results demonstrate the existence of the hollow cathode effect in the discharge and show that the spatial shape of the normalized ionization source is dependent more on the gas pressure than on the discharge voltage. The factors related to the cathode sputtering were analyzed. Investigations have demonstrated that the non uniform sputtering on the cathode surfaces in a sputter-type ion laser is due to the non-uniform distribution of electric field, flux and density of ions bombarding the cathodes.

     

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