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Moleculardynamicssimulationshavebeenappliedtotheinvestigationofthedepositionoflow energyPt3 8,Pt1 41 ,andPt2 6 6clustersonPt(0 0 1 )surface .Theevolutionprocessofclusterdepositionwithatomicaveragekineticenergies (Ea)of0 .1 ,1 .0and 1 0eVandtheeffectsonthesubstratesurfacemorphologyhavebeenanalyzed.SimulationresultsshowthatEaisanimportantparametertodescribebehavioursoftheclustes.ClusterswithlowEacannotdamagethesurfacelatticeseriouslyandtheclusterscanbeconsideredasadepositioncluster.ThepowerofclusterdamagingsurfacelatticeincreaseswiththeincreaseofEa.WhenEa=1 0eV ,theclusterscanimplantintothesubstrate.TheeffectsoflowenergeticclustersonsubstratesurfacemorphologyarealsodeterminedbyEa.Theeffectsofclusterswithmoreatoms,however,arestrongerthanthatwithfeweratoms.Themecha nismsoftheinteractionsbetweenlow energyclustersandsubstratesurfacearealsodiscussedinthispaper







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