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中国物理学会期刊

热拉伸和化学腐蚀相结合制备弯曲光纤探针

CSTR: 32037.14.aps.52.1190

Fabrication of bend optical fibre probes by heated pulling combined with chemica l ething

CSTR: 32037.14.aps.52.1190
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  • 提出了原子力/光子扫描隧道显微镜(AF/PSTM)系统的关键部分——双功能弯曲光纤探针的制作方法.采用热拉伸与动态、静态两步化学腐蚀相结合的方法制作出AF/PSTM弯曲光纤探针,弯曲角度约为150°,尖端曲率半径优于100nm,锥角范围为60°—90°.将这种双功能弯曲光纤探针应用在新研制的AF/PSTM系统上,同时获得了样品的光学与形貌图像,实现了图像分解.

     

    In this paper,a fabrication method for the bi-functional bend optical fiber probe which is the key element of atomic force/photon scanning tunnel microscope (AF/PSTM)system,is described.The heated pulling combined with dynamic/static two-s teps chemical etching method is proposed and developed.Using this method,we have made the AF/PSTM bend optical fibre probe.The bend angle of the probe is about 150 degrees;the radius of curvature at the top end is better than 100nm;the cone angle varies from 60 to 90 degrees.The bi-functional bend optical fiber probe i s used in our newly developed AF/PSTM system.The optical and topographic images are obtained simultaneously and the image separation is realized.

     

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