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中国物理学会期刊

薄膜中异常晶粒生长理论及能量各向异性分析

CSTR: 32037.14.aps.52.1207

Theory of abnormal grain growth in thin films and analysis of energy anisotropy

CSTR: 32037.14.aps.52.1207
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  • 针对柱状晶薄膜,建立了异常晶粒生长理论模型.指出薄膜中的晶粒生长,除像传统的整体材料中的晶粒生长一样考虑晶界能外,还应当考虑表面能、界面能和应变能.对能量的各向异性进行了回顾性分析.从表面能的最小化考虑,面心立方和体心立方薄膜的择优取向或织构应分别为(111)和(110);而从应变能的最小化考虑,面心立方和体心立方薄膜的择优取向或织构应分别为(110)和(100).

     

    A theoretical model is proposed for the abnormal grain growth in thin films of columnar grains. In addition to the grain boundary energy usually considered for the grain growth in bulk materials, the influences of surface energy, interface energy and strain energy are also considered in the model. A reviewed analysis is given out for the anisotropy of energy. For fcc and bcc metal films, surface energy minimization generally favours (111) and (110) textures, while strain energy minimization generally favours (110) and (100) textures.

     

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