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中国物理学会期刊

稳定、优质nc-Si/a-Si:H薄膜的研制和特性分析

CSTR: 32037.14.aps.52.1465

Preparation and characterization of the stable nc-Si/a-Si:H films

CSTR: 32037.14.aps.52.1465
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  • 利用等离子体增强化学气相沉积技术研制出了优质稳定的氢化非晶-纳米晶两相结构硅薄膜.薄膜的光电导率相对于器件质量的非晶硅有两个数量级的提高;光敏性也较好,光、暗电导比可以达到104,此外薄膜的光电导谱具有更宽的长波光谱响应.更为重要 的是薄膜的光致退化效应远小于典型的非晶硅薄膜,在光强为50mW/cm2的卤钨灯光 照24h后,光电导的衰退小于10%.这种薄膜优良的光电性能源于薄膜中的非晶母体的存在使其在 光学跃迁中的动量选择定则发生松弛,因而具有大的光学吸收系数和

     

    High-quality nc-Si/a-Si:H diphasic films with improved stability were prepared b y using the plasma-enhanced chemical vapor deposition technology. In comparison with typical amorphous silicon, the diphasic silicon films possess higher photoc onductivity (two orders larger than that of the amorphous silicon film) and fair ly good photosensitivity(the ratio of the photo-to dark-conductivity is about 10 4) and higher stability (the degradation of the photoconductivity is less than 10% after 24h long light soaking with 50 mW/cm2 intensity at room te mperature ). In addition, the diphasic silicon film has a better light spectra response in the longer wavelength range. The improvement in photoelectronic properties may be attributed to: the existence of the disorder within the amorphous matrix, whi ch breaks the momentum selection rule in the optical transition and, consequentl y, results in the large light absorption coefficient and high photosensitivity; the improved medium range order and low gap states density. Excess carriers gene rated in the amorphous matrix tend to recombine in the embedded crystallites, wh ich suppresses nonradiative recombination within the amorphous matrix and reduce s the subsequent defect creation.

     

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