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中国物理学会期刊

质子注入MBE碲镉汞n-on-p结性能研究

CSTR: 32037.14.aps.52.1496

Study of the current-voltage characteristics of n-on-p junction fabricated by pr oton-implanted molecular beam epitaxial Hg1-xCdxTe

CSTR: 32037.14.aps.52.1496
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  • 基于中波响应波段的分子束外延碲镉汞薄膜材料成功制备出不同质子注入剂量的大光敏元(5 00μm×500μm)的n-on-p结构的p-n结,并对相应的p-n结的电流-电压(I-V)特性进行 了研究.质子注入剂量为2×1015cm-2时R0A达312.5Ω ·cm2,低温热处理后达490Ω·cm2.

     

    Large area n-on-p structures of p-n junction with different proton implantation doses are fabricated on the moleculer beam epitaxial grown HgCdTe films for mid-infrared wavelength region. Current-voltage characteristics of the p-n junction are measured at 77K. The zero-bias resistance-area product (R0A ) of 312.5Ω·cm2 is obtained when the proton implantation dose is 2×10 15cm-2, and R0A increases to 490Ω·cm2 after ann ealing at low temperatures.

     

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