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中国物理学会期刊

中心波长为28.5nm多层膜镜反射率测量

CSTR: 32037.14.aps.52.809

The reflectivity measurement of the 28.5nm multilayer mirror

CSTR: 32037.14.aps.52.809
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  • 在“星光-Ⅱ”装置上以类Ne铬x射线激光作为标定源,以平场光栅谱仪为分光元件进行了285nm的Mo/Si多层膜反射镜效率测量.介绍了实验方法,给出了实验结果,本次研制的两块多层膜镜反射率分别为31%和9.6%.

     

    The reflectivity of the 28.5nm Mo/Si multilayer mirrors are measured at Xingguang-Ⅱ laser facility using a flat-field grating spectrograph with the Ne-like Cr x-ray laser as a soft x-ray source. The reflectivities obtained for two samples are 0031 and 0096.

     

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